Developing Custom Etching/Deposition Models in VICTORY Process

Introduction

VICTORY Process is supplied with a wide range of models and data for an extensive set of materials, so that you can simulate many process steps without the need to make changes in the default setup. However, you may wish to expand its capability by using your proprietary data and models. Thanks to the open modeling interface used by VICTORY Process

• you can use your own models and data by customizing
  • the open model libraries and
  • the open material database and
• you don’t have to share your local extensions, which may contain proprietary data, with SILVACO, but you can still smoothly upgrade to later versions of VICTORY Process while keeping your local extensions.

In this paper we describe how to define your own etching or deposition model and how to use this model for simulation.