Using Athena Monte Carlo Module for Ion Implantation Simulation in Silicon Carbides
Introduction
The Monte Carlo Implantation Module of ATHENA has proved to be a very accurate tool for simulation of various implantation processes. In this paper we demonstrate that the module can be successfully used not only for classical silicon-based technologies but also for other materials used in semiconductor industry. Silicon carbides were selected for this demonstration not only because they are widely used in power and high frequency electronics but also because they are most challenging objects for simulation due to their complicated lattice structures and electronic stopping models.