TCAD Simulation of a SONOS Device with Silvaco’s new FNONOS Model
Introduction
Erasable programmable read-only memory (EPROM) devices include amongst others, floating gate technology and SONOS (Polysilicon-Oxide-Nitride-Silicon) technology. Floating gate technology involves charge being stored in the polysilicon floating gate as a continuous spatial distribution of free carriers in the conduction band. In contrast, SONOS gate stack structures involve charge being stored in spatially isolated deep level traps within the nitride layer.