Intrinsic Capacitance Parameter Extraction in UTMOST III

Introduction

The intrinsic capacitance parameter extraction routine (INTCAP) is in the CAP analysis section of the UTMOST III MOS module (Routine#67). The INTCAP routine has 5 different intrinsic cap measurements and a “simulation only” capability for all intrinsic caps. Recent developments have improved the INTCAP routine. Users should have UTMOST III MOS module version 15.2.0 or higher to be able use the examples and explanations presented in this article. The INTCAP routine allows users to measure the MOS capacitances when the device is under DC bias and conducting current.