エントリー - Gigi Boss

Applying Artificial Intelligence in Fab Technology Co-Optimization (FTCO™)

2024/7/25
本ウェビナーで説明する新しいアプローチは、現在すでに実生産で使用されており、人工知能(AI)と機械学習(ML)を活用して製造工程の正確なモデルを生成します。このアプローチでは、実際の物理学と化学を考慮した製造工程のTCADデジタル・モデル(デジタル・ツイン)を使用します。

How Can I Re-Use Individual Monte-Carlo 3D Implant Profiles?

It is often the case that a design of experiments (DOE) is required to optimize the performance of a particular device.  Sometimes this simply means tweaking the implant dose for threshold voltage or other minor adjustments, but in other cases it can mean tweaking such things as high energy deep well implants.

Setting up the Wafer Orientation: Applications to Ion Implantation

Properly setting the wafer orientation in Victory Process (VP) is critical for various processes such as ion implantation, etching, and deposition. For ion implantation in particular, the determination of the wafer orientation becomes crucial, given its profound impact on profile variations in channeling and non-channeling directions.