Optical Lithography Models in ATHENA

Introduction

ATHENA’s Optolith module is designed to simulate the 3 basic lithography technologies; contact printing, proximity and projection lithography. The imaging calculations within Optolith are flexible enough to handle all three situations. Optolith is based upon a solution of the Helmholtz equation for media with complex refractive indices and the Beam Propogation Method [1]. This allows Optolith to take account of both diffraction effects and any non-linear local optical properties of the resist material.