Q. Is it possible to emulate a deep reactive ion etch process (e.g. deep trench with scalloped sidewalls) without using a physical based process simulation, such as Victory Process?
To study a non-ideal geometry and its impact on device performance, TCAD device engineers may want to generate structures with complex geometries quickly, without the added details of physically-based process simulation.
2019년 5월 1일 | 3:00am-3:30am (한국 시각)
이번 시간에 커맨드 파일 및 GDSII 레이아웃을 이용한 설계 기술 공동 최적화 (Design Technology Co-Optimization, DTCO) 실험 세트의 생성, 물리 기반 3D 능동 소자와 BEOL (Back End Of Line) 인터커넥트 셀 레벨 구조의 활용, 최종 Spice 회로 시뮬레이션을 위한 능동 소자 Spice 모델 파라미터 및 RC 기생 성분 추출 등을 설명합니다. FinFET 기반 기술을 예제로 사용하지만, 다른 기술 유형도 사용할 수 있습니다.
2019 baseline release of Victory Process includes improvements and extensions to the following modules:
Physical etching/deposition
Stress simulation
Annealing/oxidation
The 2019 TCAD baseline release of Victory Mesh now contains Solid Modeling functionality. The term Solid Modeling is used to refer to a methodology that generates or manipulates a device via geometrical operations, for example, bending, mirroring and joining or insertion.
The effect of Coulomb interaction in the absorption spectrum of quantum wells (QWs) is responsible for the quantum confined Stark effect (QCSE), which is the physical mechanism underlying the operation of electro-absorption modulators [1].
A new model has been added to Atlas to simulate QCSE in QWs and can be enabled with the following command (the qwell model must also be activated):
DeckBuild is Silvaco’s state of the art simulator interface. It is capable of running all simulators from Silvaco as well as many of the visualization tools. Figure 4-1 shows an overview where a simulation was successfully finished and the results can be inspected. Values that were extracted from a structure file are shown in the top right part of the window.
Introduction
Low-temperature polycrystalline silicon (LTPS) thin-film transistors have been widely applied to AMOLED (Active Matrix Organic Light Emitting Diode) as the most suitable means for high mobility, high switching speed and high resolution [1-2].
A Laser Annealing Process such as Excimer Laser Annealing (ELA) is used to manufacture by converting Amorphous Silicon (a-Si) to Polycrystalline Silicon (poly-Si) at low temperature. The poly-Si structure (produced through ELA) shows the laser wavelength, pulse width and spatial beam dependencies.
Introduction
With the recently launched Radiant, a graphical user interface (GUI) for Atlas-based TCAD simulations, the entry barrier for inexperienced users has been lowered. In particular, the use of guided simulation tools, for both experienced and novice researchers, can speed up the development cycle. Light emitting diodes (LEDs) have caught the attention of the scientific community for many years, especially organic-based light emitting diodes (OLEDs) and the emerging quantum dot-based light emitting diodes (QD-LEDs).
Organic thin-film transistors (OTFTs) are promising devices for future low-cost electronics[1][2]. However, to enable the development of this technology, circuit design simulation is needed. TCAD with MixedMode approach provides a suitable route for the physics based simulation of these transistors within simple circuits. As circuits become more complicated, more devices are needed and the computing time increases significantly. Compact models describe the behavior of the device with only a few equations and thus the computing time is reduced to a viable magnitude. Such equations are written down in a Verilog-A format which can be used by most SPICE simulators.