엔트리 Ingrid Schwarz

Polysilicon Gate Depletion Effects in Sub-Micron MOSFETs

It is usually assumed that the poly gate in a MOSFET is doped at a concentration such that depletion in the gate either does not occur or that any depletion effects can safely be ignored. This article aims to quantify poly depletion effects for typical sub-micron device dimensions using ATHENA and ATLAS process and device simulators.