3D Simulation of Ion Enhanced Chemical Etching with VICTORY Process
VICTORY Process is a tool for 3D simulation of the semiconductor industry’s technological processes. It allows stable and accurate modeling of the changes in a structure’s 3D geometry within etching reactors under various conditions. VICTORY Process achieves this by combining a powerful and robust hard-coded numerical engine, based on the Level Set method, with a flexible Open Modeling library which is extendable by users to suit their specific requirements.