Hints, Tips and Solutions

Adding An Impurity to a Diffusion Model Enable Diffusion of a New Impurity in a Specific Material

1. OBJECTIVE

• Add an impurity (H) to a material (silicon) for a diffusion model (Fermi).
• The description below refers to Victory Process version 7.27.X.

2. PROCEDURE

2.1 CREATE LOCAL VERSION OF ANNEALING MODEL LIBRARY

• First you want to create your own local, version of the annealing model library. Copy the model library from the installation directory anywhere to your machine:

mkdir ~/LocalLib
cd ~/LocalLib

cp –r $SILVACO/lib/victoryp/$VERSION/common/annealing.

For more information see Victory Process user manual, Section 17.5, How to Develop A Diffusion Model in Victory Process.

• Set environment variable to your local version of the annealing model library in order to redirect simulator to different model path:

SILVACO_MODEL_FILES

• Now modify this local annealing library to add new impurity species, see the following.