Process Simulation – New Features in 2019 Baseline Release

2019 baseline release of Victory Process includes improvements and extensions to the following modules:

• Physical etching/deposition
• Stress simulation
• Annealing/oxidation

1.1 Stress Simulation

1.1.1 Stress Induced Deformation
1.1.2 Simulation of Deformation Induced Stress

1.2 Etching and Deposition

1.2.1 Performance improvement in topography simulation
1.2.2 Doping dependent Physical Etching
1.2.3 Additional Feature of model for medium pressure epitaxy of SiC
1.2.4 Simulation of Line Edge Roughness (LER) effects

1.3 Diffusion and Oxidation

1.3.1 New activation model in GaN
1.3.2 Point defects diffusion model in SiC
1.3.3 Concurrent oxidation of several materials

Following are the details and example of usage of major improvement.