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File name:

simstd_aug_2003_a1.pdf

Publication Date:

Aug 01, 2003

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19.84 KB

Description:

Spreading Resistance Profiling (SRP) retains its popularity in the semiconductor industry by an inexpensive means of capturing dopant profile information. However, device engineers often incorporate SRP data into process simulation studies without properly considering SRP’s many limitations. Failing to account for these limitations jeopardizes the reliability of the data and potentially lead designers to incorrect conclusions about a device.

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