• 技术刊物 Simulation Standard

Simulation Standard

Silvaco面向半导体工艺和器件仿真工程师推出的技术刊物

Hints, Tips and Solutions – July, August, September 2019

Q. Is it possible to emulate a deep reactive ion etch process (e.g. deep trench with scalloped sidewalls) without using a physical based process simulation, such as Victory Process?To study a non-ideal geometry and its impact on device performance, TCAD device engineers may want to generate structures with complex geometries quickly, without the added details of physically-based process simulation.

Process Simulation – New Features in 2019 Baseline Release

2019 baseline release of Victory Process includes improvements and extensions to the following modules:Physical etching/deposition Stress simulation Annealing/oxidation

Meshing – New Features in 2019 Baseline Release

The 2019 TCAD baseline release of Victory Mesh now contains Solid Modeling functionality. The term Solid Modeling is used to refer to a methodology that generates or manipulates a device via geometrical operations, for example, bending, mirroring and joining or insertion.

Device Simulation – New Features in 2019 Baseline Release

The effect of Coulomb interaction in the absorption spectrum of quantum wells (QWs) is responsible for the quantum confined Stark effect (QCSE), which is the physical mechanism underlying the operation of electro-absorption modulators [1]. A new model has been added to Atlas to simulate QCSE in QWs and can be enabled with the following command (the qwell model must also be activated):

Interactive Tools – New Features in 2019 Baseline Release

DeckBuild is Silvaco’s state of the art simulator interface. It is capable of running all simulators from Silvaco as well as many of the visualization tools. Figure 4-1 shows an overview where a simulation was successfully finished and the results can be inspected. Values that were extracted from a structure file are shown in the top right part of the window.

3D TFT Simulation of Grains and Grain Boundaries

IntroductionLow-temperature polycrystalline silicon (LTPS) thin-film transistors have been widely applied to AMOLED (Active Matrix Organic Light Emitting Diode) as the most suit­able means for high mobility, high switching speed and high resolution [1-2].A Laser Annealing Process such as Excimer Laser Annealing (ELA) is used to manufacture by converting Amorphous Silicon (a-Si) to Polycrystalline Silicon (poly-Si) at low temperature. The poly-Si structure (produced through ELA) shows the laser wavelength, pulse width and spatial beam dependencies.