• 技术刊物 Simulation Standard

Simulation Standard

Silvaco面向半导体工艺和器件仿真工程师推出的技术刊物

3D Simulation of Ion Enhanced Chemical Etching with VICTORY Process

VICTORY Process is a tool for 3D simulation of the semiconductor industry’s technological processes. It allows stable and accurate modeling of the changes in a structure’s 3D geometry within etching reactors under various conditions. VICTORY Process achieves this by combining a powerful and robust hard-coded numerical engine, based on the Level Set method, with a flexible Open Modeling library which is extendable by users to suit their specific requirements.

Simulation of Transient Diffusion Enhancement of Boron with VICTORY Process in 3D, with the Plus-One Implantation Damage Model and the Five-Stream Diffusion Model

VICTORY Process is a 3D process simulation tool which allows for an accurate simulation of the doping distributions in semiconductor devices. It is able to simulate both the insertion of the doping atoms by ion implantation and their subsequent redistribution by thermal treatment.

The Studies of Regular Texture Thickness and Finger Pattern of the Front Surface by Using Silvaco TCAD Tools

The photovoltaic industry has rapidly grown since 2000 and has diversified in technology how the solar cell are manufactured. As of 2010, 70% of these cells were made from mono- and multicrystalline silicon wafer, 20% from thin films and 10% from silicon ribbons. In 1975, screen printing was first applied to solar cells for the formation of the front and rear contacts replacing expensive vacuum metallization [1]. This process and equipment for the screen-printed solar cell has been further optimized and new technologies have been introduced to improve this technology. These include an anti-reflection Silicon nitride coating with excellent surface and bulk passivity properties. Surface texture has reduced reflectivity. [2, 3] Laser edge isolation and single-side etching is used for the electrical separation of the front and rear contacts.

Extracting Concentrations from Arbitrary Shaped Well Regions

It is often the case when simulating charged coupled devices (CCDs) or image sensors, that a designer wishes to know how many electrons or holes are contained within an arbitrary shaped n or p-well region for a given bias point or after exposure to light for a certain time and intensity.

Simulation of 3D Anisotropic Crystal Etching with VICTORY Process

Anisotropic crystal etching is the common technique used in Micro Electromechanical systems (MEMS) manufacturing. It uses the property of some single crystal materials, like silicon, of having different etching rates in different crystal directions when the material is etched in special chemicals, such as potassium hydroxide (KOH). Predicting the resulting shape of the structure under such conditions requires full three-dimensional simulation of the evolution of the etched surface.

Using VICTORY Process to Simulate Thermal Oxidation of Silicon at High Pressures of Ambient Gases

Developing ULSI silicon technology requires good control of dopant diffusion and minimizing defect formation during thermal oxidation. The use of high pressures of ambient gases can have a significant impact on ability to meet such requirements [1]. In particular, high pressure steam (~10atm) allows the growth of oxide films of the order of 1 μm in less then 2.5 hours at temperature as low as 800 C. At such low temperatures dopant redistribution is substantially reduced.