{"id":42380,"date":"2022-07-08T15:53:19","date_gmt":"2022-07-08T22:53:19","guid":{"rendered":"https:\/\/silvaco.com\/%e6%9c%aa%e5%88%86%e7%b1%bb\/learn-how-to-efficiently-achieve-accurate-experimental-etch-profiles-in-finfet-and-memory-applications-with-victory-process\/"},"modified":"2023-02-17T14:38:54","modified_gmt":"2023-02-17T22:38:54","slug":"experimental-etch-profiles-finfet","status":"publish","type":"post","link":"https:\/\/silvaco.com\/zh-hans\/webinar\/learn-how-to-efficiently-achieve-accurate-experimental-etch-profiles-in-finfet-and-memory-applications-with-victory-process\/","title":{"rendered":"Learn How to Efficiently Achieve Accurate Experimental Etch Profiles in FinFET and Memory Applications with Victory TCAD Solution"},"content":{"rendered":"<div id='template_slider'  class='avia-fullwidth-slider main_color avia-shadow   avia-builder-el-0  el_before_av_section  avia-builder-el-first   container_wrap fullsize' style=' '  ><div   data-size='no scaling'  data-lightbox_size='large'  data-animation='slide'  data-conditional_play=''  data-ids='3925'  data-video_counter='0'  data-autoplay='false'  data-bg_slider='false'  data-slide_height=''  data-handle='av_slideshow_full'  data-interval='5'  data-class=' '  data-el_id=''  data-css_id=''  data-scroll_down=''  data-control_layout='av-control-default'  data-custom_markup=''  data-perma_caption=''  data-autoplay_stopper=''  data-image_attachment=''  data-min_height='110px'  data-lazy_loading='disabled'  data-src=''  data-position='top left'  data-repeat='no-repeat'  data-attach='scroll'  data-stretch=''  class='avia-slideshow avia-slideshow-1  av-control-default av-default-height-applied avia-slideshow-no scaling av_slideshow_full   avia-slide-slider '  itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><ul class='avia-slideshow-inner ' style='padding-bottom: 10.46875%;' ><li  class=' av-single-slide slide-1 ' ><div data-rel='slideshow-1' class='avia-slide-wrap '   ><div class = \"caption_fullwidth av-slideshow-caption caption_bottom\"><div class = \"container caption_container\"><div class = \"slideshow_caption\"><div class = \"slideshow_inner_caption\"><div class = \"slideshow_align_caption\"><h2  style='font-size:50px; ' class='avia-caption-title   av-small-font-size-overwrite av-small-font-size-36 av-mini-font-size-overwrite av-mini-font-size-24'  itemprop=\"name\" >Webinars<\/h2><\/div><\/div><\/div><\/div><\/div><img decoding=\"async\" class=\"wp-image-18676 avia-img-lazy-loading-not-18676\"  src=\"https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar.jpg\" width=\"1920\" height=\"201\" title='Banner Blue' alt=''  itemprop=\"thumbnailUrl\"  style='min-height:110px; min-width:1051px; ' srcset=\"https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar.jpg 1920w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-300x31.jpg 300w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-1030x108.jpg 1030w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-768x80.jpg 768w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-1536x161.jpg 1536w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-1500x157.jpg 1500w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-705x74.jpg 705w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-43x5.jpg 43w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-63x7.jpg 63w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-48x5.jpg 48w\" sizes=\"(max-width: 1920px) 100vw, 1920px\" \/><\/div><\/li><\/ul><\/div><\/div>\n<div id='av_section_1'  class='avia-section main_color avia-section-small avia-no-border-styling  avia-bg-style-scroll  avia-builder-el-1  el_after_av_slideshow_full  avia-builder-el-last   container_wrap fullsize' style='background-color: #ffffff;  margin-top:0px; margin-bottom:0px; '  ><div class='container' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-42380'><div class='entry-content-wrapper clearfix'>\n<div class='flex_column_table av-equal-height-column-flextable -flextable' style='margin-top:20px; margin-bottom:0px; '><div class=\"flex_column av_three_fourth  flex_column_table_cell av-equal-height-column av-align-top first  avia-builder-el-2  el_before_av_one_fourth  avia-builder-el-first  \" style='padding:0px 0px 0px 0px ; border-radius:0px; '><section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><h1>Learn How to Efficiently Achieve Accurate Experimental Etch Profiles in FinFET and Memory Applications with Victory TCAD Solution<\/h1>\n<p><img loading=\"lazy\" decoding=\"async\" class=\" wp-image-42118 alignright\" src=\"https:\/\/silvaco.com\/wp-content\/uploads\/2022\/07\/Webinar-11-Aug-300x151.jpg\" alt=\"Aug 11 webinar image\" width=\"280\" height=\"141\" srcset=\"https:\/\/silvaco.com\/wp-content\/uploads\/2022\/07\/Webinar-11-Aug-300x151.jpg 300w, https:\/\/silvaco.com\/wp-content\/uploads\/2022\/07\/Webinar-11-Aug-1030x518.jpg 1030w, https:\/\/silvaco.com\/wp-content\/uploads\/2022\/07\/Webinar-11-Aug-768x386.jpg 768w, https:\/\/silvaco.com\/wp-content\/uploads\/2022\/07\/Webinar-11-Aug-705x354.jpg 705w, https:\/\/silvaco.com\/wp-content\/uploads\/2022\/07\/Webinar-11-Aug-43x22.jpg 43w, https:\/\/silvaco.com\/wp-content\/uploads\/2022\/07\/Webinar-11-Aug-63x32.jpg 63w, https:\/\/silvaco.com\/wp-content\/uploads\/2022\/07\/Webinar-11-Aug-48x24.jpg 48w, https:\/\/silvaco.com\/wp-content\/uploads\/2022\/07\/Webinar-11-Aug.jpg 1327w\" sizes=\"(max-width: 280px) 100vw, 280px\" \/>When employing process simulation to generate a complex device structure, TCAD engineers often face the task of reproducing the exact etch profile that has been observed in semiconductor fabrication. Silvaco Victory Process offers several geometric models to efficiently achieve etch geometries that accurately match microscopy images (e.g., transmission electron microscopy).<\/p>\n<p>In this webinar, we present these geometric etch models in the context of FinFET and memory applications. We demonstrate techniques to realize fin shaping, non-ideal etch profiles (bowing, twisting), and self-aligned processes (multi-patterning).<\/p>\n<h4><strong>What You Will Learn<\/strong><\/h4>\n<ul>\n<li>How to achieve accurate etch profiles as observed on microscopy images<\/li>\n<li>How to efficiently use Silvaco Victory Process to achieve fin shapes in FinFET flows<\/li>\n<li>How apply geometric etch modes for trenches and contact holes in memory applications (3D NAND)<\/li>\n<li>How to use Silvaco Victory Process\u2019s powerful and adaptable ETCH DRY and ETCH POLYLINE commands<\/li>\n<\/ul>\n<\/div><\/section><br \/>\n<div   class='hr hr-default   avia-builder-el-4  el_after_av_textblock  el_before_av_textblock '><span class='hr-inner ' ><span class='hr-inner-style'><\/span><\/span><\/div><br \/>\n<section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><h2>Presenter<\/h2>\n<\/div><\/section><br \/>\n<section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><p><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-42112 size-full alignleft\" src=\"https:\/\/silvaco.com\/wp-content\/uploads\/2022\/07\/Alexander-Toifl.jpg\" alt=\"Alexander Toifl\" width=\"84\" height=\"103\" srcset=\"https:\/\/silvaco.com\/wp-content\/uploads\/2022\/07\/Alexander-Toifl.jpg 84w, https:\/\/silvaco.com\/wp-content\/uploads\/2022\/07\/Alexander-Toifl-30x37.jpg 30w, https:\/\/silvaco.com\/wp-content\/uploads\/2022\/07\/Alexander-Toifl-45x55.jpg 45w, https:\/\/silvaco.com\/wp-content\/uploads\/2022\/07\/Alexander-Toifl-39x48.jpg 39w\" sizes=\"(max-width: 84px) 100vw, 84px\" \/><strong>Alexander Toifl, Development Engineer, Silvaco TCAD<\/strong> DivisionSince joining Silvaco in 2021, he has worked on etch and deposition models in Victory Process. Alexander Toifl received a doctoral degree in electrical engineering from the University of Technology Vienna (TU Wien), Austria, and a M.S. degree in microelectronics and photonics from the same institution.<\/p>\n<\/div><\/section><br \/>\n<div   class='hr hr-default   avia-builder-el-7  el_after_av_textblock  el_before_av_textblock '><span class='hr-inner ' ><span class='hr-inner-style'><\/span><\/span><\/div><br \/>\n<section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><h3>WHO SHOULD ATTEND:<\/h3>\n<\/div><\/section><br \/>\n<section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><p>Engineers and management looking for solutions to efficiently achieve etch profiles in a process TCAD flow.<\/p>\n<\/div><\/section><\/p><\/div><div class='av-flex-placeholder'><\/div><div class=\"flex_column av_one_fourth  flex_column_table_cell av-equal-height-column av-align-top   avia-builder-el-10  el_after_av_three_fourth  avia-builder-el-last  \" style='padding:0px 0px 0px 0px ; border-radius:0px; '><p><section class=\"av_textblock_section \"  id=\"date\"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><p><strong>When<\/strong>: August 11, 2022<br \/>\n<strong>Where<\/strong>: Online<br \/>\n<strong>Time<\/strong>: 10:00am-10:30am-(PDT)<br \/>\n<strong>Language<\/strong>: English<\/p>\n<\/div><\/section><br \/>\n<div   class='hr hr-default   avia-builder-el-12  el_after_av_textblock  el_before_av_codeblock '><span class='hr-inner ' ><span class='hr-inner-style'><\/span><\/span><\/div><br \/>\n<br \/>\n<div  class='avia-button-wrap avia-button-center  avia-builder-el-14  el_after_av_codeblock  el_before_av_hr ' ><a href='\/dynamicweb\/jsp\/downloads\/DownloadDocStepsAction.do?req=silen-download&amp;nm=experimental_etch_profiles.mp4&amp;prefixname=video'  class='avia-button  avia-color-grey   avia-icon_select-no avia-size-small avia-position-center '   ><span class='avia_iconbox_title' >Register to View Archive<\/span><\/a><\/div><br \/>\n<div   class='hr hr-default   avia-builder-el-15  el_after_av_button  avia-builder-el-last '><span class='hr-inner ' ><span class='hr-inner-style'><\/span><\/span><\/div><\/p><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n","protected":false},"excerpt":{"rendered":"<p><b>August 11, 2022<\/b><br \/>\nIn this webinar, we present these geometric etch models in the context of FinFET and memory applications. We demonstrate techniques to realize fin shaping, non-ideal etch profiles (bowing, twisting), and self-aligned processes (multi-patterning).<\/p>\n","protected":false},"author":8,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[7729],"tags":[7716],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v24.0 (Yoast SEO v24.0) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Learn How to Efficiently Achieve Accurate Experimental Etch Profiles in FinFET and Memory Applications with Victory TCAD Solution -<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/silvaco.com\/zh-hans\/webinar\/learn-how-to-efficiently-achieve-accurate-experimental-etch-profiles-in-finfet-and-memory-applications-with-victory-process\/\" \/>\n<meta property=\"og:locale\" content=\"zh_CN\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Learn How to Efficiently Achieve Accurate Experimental Etch Profiles in FinFET and Memory Applications with Victory TCAD Solution\" \/>\n<meta property=\"og:description\" content=\"August 11, 2022 In this webinar, we present these geometric etch models in the context of FinFET and memory applications. We demonstrate techniques to realize fin shaping, non-ideal etch profiles (bowing, twisting), and self-aligned processes (multi-patterning).\" \/>\n<meta property=\"og:url\" content=\"https:\/\/silvaco.com\/zh-hans\/webinar\/learn-how-to-efficiently-achieve-accurate-experimental-etch-profiles-in-finfet-and-memory-applications-with-victory-process\/\" \/>\n<meta property=\"og:site_name\" content=\"Silvaco\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/SilvacoSoftware\/\" \/>\n<meta property=\"article:published_time\" content=\"2022-07-08T22:53:19+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2023-02-17T22:38:54+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/silvaco.com\/wp-content\/uploads\/2022\/07\/Webinar-11-Aug-300x151.jpg\" \/>\n<meta name=\"author\" content=\"Gigi Boss\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:creator\" content=\"@SilvacoSoftware\" \/>\n<meta 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