{"id":37043,"date":"1998-08-04T15:21:45","date_gmt":"1998-08-04T15:21:45","guid":{"rendered":"https:\/\/silvaco.com\/%e6%9c%aa%e5%88%86%e7%b1%bb\/hints-tips-august-1998\/"},"modified":"2026-10-15T14:44:37","modified_gmt":"2026-10-15T21:44:37","slug":"hints-tips-august-1998","status":"publish","type":"post","link":"https:\/\/silvaco.com\/zh-hans\/simulation-standard-zh-hans\/hints-tips-august-1998\/","title":{"rendered":"HINTS &#038; TIPS &#8211; August 1998"},"content":{"rendered":"<h1>HINTS &amp; TIPS<\/h1>\n<p class=\"regular\" align=\"left\"><b>Q:\u00a0<\/b>How can the lateral implant straggle be tuned separately to the vertical implant profile?<\/p>\n<p><b>A:<\/b>\u00a0When using the analytical implant tables in\u00a0<b>ATHENA<\/b>\u00a0the default model for the lateral implant range assumes a gaussian profile with a standard deviation equal to the vertical standard deviation (delta Rp) read from the table. This approximation is reasonable for amorphous implant substrates. This includes cases where the implant beam has been amorphised by a screen oxide or is implanted at a high angle.<\/p>\n<p>Tuning of the lateral implant range can be done by specifying the lateral standard deviation prior to the implant:<\/p>\n<blockquote><p><tt>MOMENTS ...... LSTD.DEV=&lt;value&gt;<\/tt><\/p>\n<p><tt>IMPLANT ......<\/tt><\/p><\/blockquote>\n<p><span class=\"regular\">However this is cumbersome to use in many cases since the<\/span>\u00a0<tt>MOMENTS<\/tt>\u00a0<span class=\"regular\">statement requires explicit definition of the implant dose and energy and all the vertical implant parameters. Therefore it is more convenient to use a unit less scaling parameter<\/span>\u00a0<tt>LAT.RATIO1\u00a0<\/tt><span class=\"regular\">on the<\/span><tt>\u00a0IMPLANT<\/tt>\u00a0<span class=\"regular\">statement to multiply the default lateral straggle by a factor. The default for<\/span>\u00a0<tt>LAT.RATIO1<\/tt>\u00a0<span class=\"regular\">is 1.0 so to slightly increase the lateral straggle of an arsenic implant the following syntax might be used:<\/span><\/p>\n<blockquote><p><tt>IMPLANT ARSENIC DOSE=&lt;v&gt; ENERGY=&lt;v&gt; LAT.RATIO1=1.2 PRINT.MOM<\/tt><\/p><\/blockquote>\n<p><span class=\"regular\">This<\/span>\u00a0<tt>PRINT.MOM<\/tt>\u00a0<span class=\"regular\">parameter is included as a useful check. It prints the implant moments used into the run-time output. Figure 1 shows the effect of adjusting only<\/span>\u00a0<tt>LAT.RATIO1.<\/tt>\u00a0<span class=\"regular\">The vertical implant depth is constant while the lateral implant straggle can be tuned to match electrical results.<\/span><\/p>\n<p><img loading=\"lazy\" width=\"1212\" height=\"1669\" src=\"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_aug_1998_hints.jpg\" class=\"cleaned-enfold-image\" alt=\"\" decoding=\"async\" loading=\"lazy\" srcset=\"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_aug_1998_hints.jpg 1212w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_aug_1998_hints-218x300.jpg 218w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_aug_1998_hints-748x1030.jpg 748w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_aug_1998_hints-768x1058.jpg 768w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_aug_1998_hints-1115x1536.jpg 1115w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_aug_1998_hints-1089x1500.jpg 1089w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_aug_1998_hints-512x705.jpg 512w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_aug_1998_hints-27x37.jpg 27w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_aug_1998_hints-40x55.jpg 40w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_aug_1998_hints-35x48.jpg 35w\" sizes=\"auto, (max-width: 1212px) 100vw, 1212px\" \/><\/p>\n<p><a href=\"https:\/\/silvaco.com\/dynamicweb\/jsp\/downloads\/DownloadDocStepsAction.do?req=download&#038;nm=simstd_aug_1998_hints.pdf\" class=\"BGT-btn\" target=\"_blank\" rel=\"noopener noreferrer\">Download Simulation Standard<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>When using the analytical implant tables in\u00a0ATHENA\u00a0the default model for the lateral implant range assumes a gaussian profile with a standard deviation equal to the vertical standard deviation (delta Rp) read from the table. This approximation is reasonable for amorphous implant substrates.<\/p>\n","protected":false},"author":5,"featured_media":21556,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"inline_featured_image":false,"footnotes":""},"categories":[7723],"tags":[],"class_list":["post-37043","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-simulation-standard-zh-hans","entry","has-media"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v28.7 (Yoast SEO v28.7) - https:\/\/yoast.com\/product\/yoast-seo-premium-wordpress\/ -->\n<title>HINTS &amp; TIPS - August 1998 - Silvaco<\/title>\n<meta name=\"description\" content=\"When using the analytical implant tables in\u00a0ATHENA\u00a0the default model for the lateral implant range assumes a gaussian profile with a standard deviation equal to the vertical standard deviation (delta Rp) read from the table. This approximation is reasonable for amorphous implant substrates.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/silvaco.com\/zh-hans\/simulation-standard-zh-hans\/hints-tips-august-1998\/\" \/>\n<meta property=\"og:locale\" content=\"zh_CN\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"HINTS &amp; TIPS - August 1998\" \/>\n<meta property=\"og:description\" content=\"When using the analytical implant tables in\u00a0ATHENA\u00a0the default model for the lateral implant range assumes a gaussian profile with a standard deviation equal to the vertical standard deviation (delta Rp) read from the table. This approximation is reasonable for amorphous implant substrates.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/silvaco.com\/zh-hans\/simulation-standard-zh-hans\/hints-tips-august-1998\/\" \/>\n<meta property=\"og:site_name\" content=\"Silvaco\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/SilvacoSoftware\/\" \/>\n<meta property=\"article:published_time\" content=\"1998-08-04T15:21:45+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2026-10-15T21:44:37+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_aug_1998_hints.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"1212\" \/>\n\t<meta property=\"og:image:height\" content=\"1669\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"author\" content=\"Ingrid Schwarz\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:creator\" content=\"@SilvacoSoftware\" \/>\n<meta name=\"twitter:site\" content=\"@SilvacoSoftware\" \/>\n<meta name=\"twitter:label1\" content=\"\u4f5c\u8005\" \/>\n\t<meta name=\"twitter:data1\" content=\"Ingrid Schwarz\" \/>\n\t<meta name=\"twitter:label2\" content=\"\u9884\u8ba1\u9605\u8bfb\u65f6\u95f4\" \/>\n\t<meta name=\"twitter:data2\" content=\"1 minute\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\\\/\\\/silvaco.com\\\/zh-hans\\\/simulation-standard-zh-hans\\\/hints-tips-august-1998\\\/#article\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/silvaco.com\\\/zh-hans\\\/simulation-standard-zh-hans\\\/hints-tips-august-1998\\\/\"},\"author\":{\"name\":\"Ingrid Schwarz\",\"@id\":\"https:\\\/\\\/silvaco.com\\\/#\\\/schema\\\/person\\\/f85f880bc8a7ce823b36a9072e1f0a29\"},\"headline\":\"HINTS &#038; TIPS &#8211; August 1998\",\"datePublished\":\"1998-08-04T15:21:45+00:00\",\"dateModified\":\"2026-10-15T21:44:37+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\\\/\\\/silvaco.com\\\/zh-hans\\\/simulation-standard-zh-hans\\\/hints-tips-august-1998\\\/\"},\"wordCount\":256,\"image\":{\"@id\":\"https:\\\/\\\/silvaco.com\\\/zh-hans\\\/simulation-standard-zh-hans\\\/hints-tips-august-1998\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/silvaco.com\\\/wp-content\\\/uploads\\\/simulationstandard\\\/simstd_aug_1998_hints.jpg\",\"articleSection\":[\"Simulation Standard\"],\"inLanguage\":\"zh-CN\"},{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/silvaco.com\\\/zh-hans\\\/simulation-standard-zh-hans\\\/hints-tips-august-1998\\\/\",\"url\":\"https:\\\/\\\/silvaco.com\\\/zh-hans\\\/simulation-standard-zh-hans\\\/hints-tips-august-1998\\\/\",\"name\":\"HINTS & TIPS - August 1998 - Silvaco\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/silvaco.com\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\\\/\\\/silvaco.com\\\/zh-hans\\\/simulation-standard-zh-hans\\\/hints-tips-august-1998\\\/#primaryimage\"},\"image\":{\"@id\":\"https:\\\/\\\/silvaco.com\\\/zh-hans\\\/simulation-standard-zh-hans\\\/hints-tips-august-1998\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/silvaco.com\\\/wp-content\\\/uploads\\\/simulationstandard\\\/simstd_aug_1998_hints.jpg\",\"datePublished\":\"1998-08-04T15:21:45+00:00\",\"dateModified\":\"2026-10-15T21:44:37+00:00\",\"author\":{\"@id\":\"https:\\\/\\\/silvaco.com\\\/#\\\/schema\\\/person\\\/f85f880bc8a7ce823b36a9072e1f0a29\"},\"description\":\"When using the analytical implant tables in\u00a0ATHENA\u00a0the default model for the lateral implant range assumes a gaussian profile with a standard deviation equal to the vertical standard deviation (delta Rp) read from the table. 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