{"id":37029,"date":"1998-11-01T16:34:46","date_gmt":"1998-11-02T00:34:46","guid":{"rendered":"https:\/\/silvaco.com\/%e6%9c%aa%e5%88%86%e7%b1%bb\/validation-of-clever-interconnect-parasitics-with-0-18-%c2%b5m-process-measurements-benoit-froment-and-herve-jaouen-sgs-thomson-microelectronics\/"},"modified":"2022-05-05T12:35:01","modified_gmt":"2022-05-05T19:35:01","slug":"validation-of-clever-interconnect-parasitics-with-0-18-%c2%b5m-process-measurements-benoit-froment-and-herve-jaouen-sgs-thomson-microelectronics","status":"publish","type":"post","link":"https:\/\/silvaco.com\/zh-hans\/analog-custom-design-zh-hans\/parasiticsnetlist-zh-hans\/validation-of-clever-interconnect-parasitics-with-0-18-%c2%b5m-process-measurements-benoit-froment-and-herve-jaouen-sgs-thomson-microelectronics\/","title":{"rendered":"Validation of CLEVER Interconnect Parasitics with 0.18 \u00b5m Process Measurements Benoit Froment and Herve Jaouen &#8211; SGS-Thomson Microelectronics"},"content":{"rendered":"<div id='template_overview'  class='avia-section main_color avia-section-small avia-no-border-styling  avia-bg-style-scroll  avia-builder-el-0  el_before_av_section  avia-builder-el-first   container_wrap fullsize' style='background-color: #ffffff;  margin-top:0px; margin-bottom:0px; '  ><div class='container' ><main  role=\"main\" itemprop=\"mainContentOfPage\"  class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-37029'><div class='entry-content-wrapper clearfix'>\n<div class='flex_column_table av-equal-height-column-flextable -flextable' style='margin-top:20px; margin-bottom:0px; '><div class=\"flex_column av_three_fourth  flex_column_table_cell av-equal-height-column av-align-top first  avia-builder-el-1  el_before_av_one_fourth  avia-builder-el-first  \" style='padding:0px 0px 0px 0px ; border-radius:0px; '><section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><h1>Validation of CLEVER Interconnect Parasitics with 0.18 \u00b5m Process Measurements <i>Benoit Froment and Herve Jaouen-SGS-Thomson Microelectronics<\/i><\/h1>\n<p class=\"feature\">Motivation<\/p>\n<p><b>CLEVER<\/b>\u00a0can perform accurate field solver extractions of resistance and capacitance from 3D structures generated from realistic process simulation. Comparison of\u00a0<b>CLEVER<\/b>\u00a0results with measurements made by SGS-Thomson Microelectronics were done to validate the simulator. Validation was done for a state-of-the-art process applicable to 0.18 \u00b5m technology. The process has the following features:<\/p>\n<ul class=\"regular3\">\n<li>multiple dielectrics<\/li>\n<li>conformal deposition around conductors<\/li>\n<li>inter-metal fill with low-k dielectric<\/li>\n<li><span class=\"regular\">non rectangular metal cross sections<\/span><\/li>\n<\/ul>\n<p class=\"feature\">Process Description<\/p>\n<p>The aim of the validation exercise is to make comparison of simulated and measured capacitances. To achieve this it is necessary to be very precise in the description of the process steps. The capacitances for deep sub-micron structures are highly dependent on process geometry especially for multi-dielectric technologies.\u00a0<b>CLEVER<\/b>\u00a0was used since it is designed to model interconnect parasitics by simulating the 3D back end process in a very accurate manner due to its advanced process models for photolithography deposition and etching [1].<\/p>\n<p>The measurements and\u00a0<b>CLEVER<\/b>\u00a0simulations were carried out with the ST HCMOS7X process. The pitch is 1um and the part of SiO2 usually deposited by plasma (ECR), is replaced by a low-k material gapfill (Fox). The Fox thickness target is around 600nm. The permittivity of Fox deposited between metal line is around 3, whereas the dielectric constant of the TEOS capping layer is 4.2. However, there is a slight variation on these values due to the process dispersion. It is assumed that these fluctuations are under 5% of the initial value.<\/p>\n<\/div><\/section><\/div><div class='av-flex-placeholder'><\/div><div class=\"flex_column av_one_fourth  flex_column_table_cell av-equal-height-column av-align-top av-zero-column-padding   avia-builder-el-3  el_after_av_three_fourth  avia-builder-el-last  \" style='border-radius:0px; ' id=\"whitepaper\" ><p><div  class='avia-builder-widget-area clearfix  avia-builder-el-4  el_before_av_image  avia-builder-el-first '><div id=\"nav_menu-29\" class=\"widget clearfix widget_nav_menu\"><div class=\"menu-simulation-standard-side-menu-chinese-simplified-container\"><ul id=\"menu-simulation-standard-side-menu-chinese-simplified\" class=\"menu\"><li id=\"menu-item-35571\" class=\"menu-item menu-item-type-post_type menu-item-object-page menu-item-35571\"><a href=\"https:\/\/silvaco.com\/zh-hans\/technical-library\/simulation-standard\/\">Simulation Standard<\/a><\/li>\n<\/ul><\/div><\/div><\/div><br \/>\n<div  class='avia-image-container  av-styling-    avia-builder-el-5  el_after_av_sidebar  el_before_av_button  avia-align-center '  itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\"  ><div class='avia-image-container-inner'><div class='avia-image-overlay-wrap'><a href=\"\/dynamicweb\/jsp\/downloads\/DownloadDocStepsAction.do?req=download&amp;nm=simstd_nov_1998_a1.pdf\" class='avia_image' target=\"_blank\" rel=\"noopener noreferrer\"><img decoding=\"async\" width=\"216\" height=\"300\" class='wp-image-22234 avia-img-lazy-loading-not-22234 avia_image' src=\"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_1998_a1-216x300.jpg\" alt='' title='simstd_nov_1998_a1'  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_1998_a1-216x300.jpg 216w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_1998_a1-742x1030.jpg 742w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_1998_a1-768x1066.jpg 768w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_1998_a1-1106x1536.jpg 1106w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_1998_a1-1080x1500.jpg 1080w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_1998_a1-508x705.jpg 508w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_1998_a1-27x37.jpg 27w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_1998_a1-40x55.jpg 40w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_1998_a1-35x48.jpg 35w, https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_1998_a1.jpg 1202w\" sizes=\"(max-width: 216px) 100vw, 216px\" \/><\/a><\/div><\/div><\/div><br \/>\n<div  class='avia-button-wrap avia-button-center  avia-builder-el-6  el_after_av_image  avia-builder-el-last ' ><a href='\/dynamicweb\/jsp\/downloads\/DownloadDocStepsAction.do?req=download&amp;nm=simstd_nov_1998_a1.pdf' class='avia-button  avia-color-grey   avia-icon_select-yes-right-icon avia-size-small avia-position-center ' target=\"_blank\" rel=\"noopener noreferrer\"><span class='avia_iconbox_title' >Download Simulation Standard<\/span><span class='avia_button_icon avia_button_icon_right' aria-hidden='true' data-av_icon='\ue875' data-av_iconfont='entypo-fontello'><\/span><\/a><\/div><\/p><\/div><\/div><!--close column table wrapper. Autoclose: 1 --><\/div><\/div><\/main><!-- close content main element --><\/div><\/div><div id='av_section_2'  class='avia-section main_color avia-section-small avia-no-border-styling  avia-bg-style-scroll  avia-builder-el-7  el_after_av_section  avia-builder-el-last   container_wrap fullsize' style='background-color: #ffffff;  margin-top:0px; margin-bottom:0px; '  ><div class='container' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-37029'><div class='entry-content-wrapper clearfix'>\n<div class='flex_column_table av-equal-height-column-flextable -flextable' style='margin-top:20px; margin-bottom:0px; '><div class=\"flex_column av_one_full  flex_column_table_cell av-equal-height-column av-align-top first  avia-builder-el-8  avia-builder-el-no-sibling  \" style='padding:0px 0px 0px 0px ; border-radius:0px; '><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<\/p>\n","protected":false},"excerpt":{"rendered":"<p>CLEVER\u00a0can perform accurate field solver extractions of resistance and capacitance from 3D structures generated from realistic process simulation. Comparison of\u00a0CLEVER\u00a0results with measurements made by SGS-Thomson Microelectronics were done to validate the simulator.<\/p>\n","protected":false},"author":5,"featured_media":22234,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[7719,7723],"tags":[7876],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v24.0 (Yoast SEO v24.0) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Validation of CLEVER Interconnect Parasitics with 0.18 \u00b5m Process Measurements Benoit Froment and Herve Jaouen - SGS-Thomson Microelectronics - Silvaco<\/title>\n<meta name=\"description\" content=\"CLEVER\u00a0can perform accurate field solver extractions of resistance and capacitance from 3D structures generated from realistic process simulation. 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Comparison of\u00a0CLEVER\u00a0results with measurements made by SGS-Thomson Microelectronics were done to validate the simulator.","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/silvaco.com\/simulation-standard\/validation-of-clever-interconnect-parasitics-with-0-18-\u00b5m-process-measurements-benoit-froment-and-herve-jaouen-sgs-thomson-microelectronics\/","og_locale":"zh_CN","og_type":"article","og_title":"Validation of CLEVER Interconnect Parasitics with 0.18 \u00b5m Process Measurements Benoit Froment and Herve Jaouen - SGS-Thomson Microelectronics","og_description":"CLEVER\u00a0can perform accurate field solver extractions of resistance and capacitance from 3D structures generated from realistic process simulation. Comparison of\u00a0CLEVER\u00a0results with measurements made by SGS-Thomson Microelectronics were done to validate the simulator.","og_url":"https:\/\/silvaco.com\/simulation-standard\/validation-of-clever-interconnect-parasitics-with-0-18-\u00b5m-process-measurements-benoit-froment-and-herve-jaouen-sgs-thomson-microelectronics\/","og_site_name":"Silvaco","article_publisher":"https:\/\/www.facebook.com\/SilvacoSoftware\/","article_published_time":"1998-11-02T00:34:46+00:00","article_modified_time":"2022-05-05T19:35:01+00:00","og_image":[{"width":1202,"height":1669,"url":"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_1998_a1.jpg","type":"image\/jpeg"}],"author":"Ingrid Schwarz","twitter_card":"summary_large_image","twitter_creator":"@SilvacoSoftware","twitter_site":"@SilvacoSoftware","twitter_misc":{"\u4f5c\u8005":"Ingrid Schwarz","\u9884\u8ba1\u9605\u8bfb\u65f6\u95f4":"5 \u5206"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/silvaco.com\/simulation-standard\/validation-of-clever-interconnect-parasitics-with-0-18-%c2%b5m-process-measurements-benoit-froment-and-herve-jaouen-sgs-thomson-microelectronics\/","url":"https:\/\/silvaco.com\/simulation-standard\/validation-of-clever-interconnect-parasitics-with-0-18-%c2%b5m-process-measurements-benoit-froment-and-herve-jaouen-sgs-thomson-microelectronics\/","name":"Validation of CLEVER Interconnect Parasitics with 0.18 \u00b5m Process Measurements Benoit Froment and Herve Jaouen - SGS-Thomson Microelectronics - Silvaco","isPartOf":{"@id":"https:\/\/silvaco.com\/#website"},"primaryImageOfPage":{"@id":"https:\/\/silvaco.com\/simulation-standard\/validation-of-clever-interconnect-parasitics-with-0-18-%c2%b5m-process-measurements-benoit-froment-and-herve-jaouen-sgs-thomson-microelectronics\/#primaryimage"},"image":{"@id":"https:\/\/silvaco.com\/simulation-standard\/validation-of-clever-interconnect-parasitics-with-0-18-%c2%b5m-process-measurements-benoit-froment-and-herve-jaouen-sgs-thomson-microelectronics\/#primaryimage"},"thumbnailUrl":"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_1998_a1.jpg","datePublished":"1998-11-02T00:34:46+00:00","dateModified":"2022-05-05T19:35:01+00:00","author":{"@id":"https:\/\/silvaco.com\/#\/schema\/person\/f85f880bc8a7ce823b36a9072e1f0a29"},"description":"CLEVER\u00a0can perform accurate field solver extractions of resistance and capacitance from 3D structures generated from realistic process simulation. Comparison of\u00a0CLEVER\u00a0results with measurements made by SGS-Thomson Microelectronics were done to validate the simulator.","breadcrumb":{"@id":"https:\/\/silvaco.com\/simulation-standard\/validation-of-clever-interconnect-parasitics-with-0-18-%c2%b5m-process-measurements-benoit-froment-and-herve-jaouen-sgs-thomson-microelectronics\/#breadcrumb"},"inLanguage":"zh-CN","potentialAction":[{"@type":"ReadAction","target":["https:\/\/silvaco.com\/simulation-standard\/validation-of-clever-interconnect-parasitics-with-0-18-%c2%b5m-process-measurements-benoit-froment-and-herve-jaouen-sgs-thomson-microelectronics\/"]}]},{"@type":"ImageObject","inLanguage":"zh-CN","@id":"https:\/\/silvaco.com\/simulation-standard\/validation-of-clever-interconnect-parasitics-with-0-18-%c2%b5m-process-measurements-benoit-froment-and-herve-jaouen-sgs-thomson-microelectronics\/#primaryimage","url":"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_1998_a1.jpg","contentUrl":"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_1998_a1.jpg","width":1202,"height":1669},{"@type":"BreadcrumbList","@id":"https:\/\/silvaco.com\/simulation-standard\/validation-of-clever-interconnect-parasitics-with-0-18-%c2%b5m-process-measurements-benoit-froment-and-herve-jaouen-sgs-thomson-microelectronics\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u9996\u9875","item":"https:\/\/silvaco.com\/zh-hans\/"},{"@type":"ListItem","position":2,"name":"Validation of CLEVER Interconnect Parasitics with 0.18 \u00b5m Process Measurements Benoit Froment and Herve Jaouen &#8211; SGS-Thomson Microelectronics"}]},{"@type":"WebSite","@id":"https:\/\/silvaco.com\/#website","url":"https:\/\/silvaco.com\/","name":"Silvaco","description":"","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/silvaco.com\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"zh-CN"},{"@type":"Person","@id":"https:\/\/silvaco.com\/#\/schema\/person\/f85f880bc8a7ce823b36a9072e1f0a29","name":"Ingrid Schwarz","image":{"@type":"ImageObject","inLanguage":"zh-CN","@id":"https:\/\/silvaco.com\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/d3bb75be07e3e2b63d0be26dc8912ffe?s=96&d=blank&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/d3bb75be07e3e2b63d0be26dc8912ffe?s=96&d=blank&r=g","caption":"Ingrid Schwarz"},"url":"https:\/\/silvaco.com\/zh-hans\/author\/ingrid\/"}]}},"_links":{"self":[{"href":"https:\/\/silvaco.com\/zh-hans\/wp-json\/wp\/v2\/posts\/37029"}],"collection":[{"href":"https:\/\/silvaco.com\/zh-hans\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/silvaco.com\/zh-hans\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/silvaco.com\/zh-hans\/wp-json\/wp\/v2\/users\/5"}],"replies":[{"embeddable":true,"href":"https:\/\/silvaco.com\/zh-hans\/wp-json\/wp\/v2\/comments?post=37029"}],"version-history":[{"count":1,"href":"https:\/\/silvaco.com\/zh-hans\/wp-json\/wp\/v2\/posts\/37029\/revisions"}],"predecessor-version":[{"id":37034,"href":"https:\/\/silvaco.com\/zh-hans\/wp-json\/wp\/v2\/posts\/37029\/revisions\/37034"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/silvaco.com\/zh-hans\/wp-json\/wp\/v2\/media\/22234"}],"wp:attachment":[{"href":"https:\/\/silvaco.com\/zh-hans\/wp-json\/wp\/v2\/media?parent=37029"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/silvaco.com\/zh-hans\/wp-json\/wp\/v2\/categories?post=37029"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/silvaco.com\/zh-hans\/wp-json\/wp\/v2\/tags?post=37029"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}