Download Simulation Standard<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"ATHENA\u00a0version 5.0 includes a new Binary Collision Algorithm (BCA) for accurate Monte-Carlo implant modeling down to sub-1keV energies. This new BCA code is a 3D model that takes account of channeling in all possible crystal directions, not just the vertical direction. Accurate modeling of all channeling directions becomes an important factor for low energy implants such as is used by the new generation of very deep submicron devices.<\/p>\n","protected":false},"author":12,"featured_media":22165,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"inline_featured_image":false,"footnotes":""},"categories":[7723],"tags":[],"class_list":["post-36983","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-simulation-standard-zh-hans","entry","has-media"],"yoast_head":"\n
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