{"id":36169,"date":"2016-04-28T16:17:25","date_gmt":"2016-04-28T16:17:25","guid":{"rendered":"https:\/\/silvaco.com\/%e6%9c%aa%e5%88%86%e7%b1%bb\/simulation-of-physical-etching-in-memory-technology\/"},"modified":"2021-10-13T09:57:16","modified_gmt":"2021-10-13T16:57:16","slug":"simulation-of-physical-etching-in-memory-technology","status":"publish","type":"post","link":"https:\/\/silvaco.com\/zh-hans\/tcad-zh-hans\/tcad-webinars-zh-hans\/simulation-of-physical-etching-in-memory-technology\/","title":{"rendered":"Simulation of Physical Etching in Memory Technology"},"content":{"rendered":"<div id='template_slider'  class='avia-fullwidth-slider main_color avia-shadow   avia-builder-el-0  el_before_av_section  avia-builder-el-first   container_wrap fullsize' style=' '  ><div   data-size='no scaling'  data-lightbox_size='large'  data-animation='slide'  data-conditional_play=''  data-ids='3925'  data-video_counter='0'  data-autoplay='false'  data-bg_slider='false'  data-slide_height=''  data-handle='av_slideshow_full'  data-interval='5'  data-class=' '  data-el_id=''  data-css_id=''  data-scroll_down=''  data-control_layout='av-control-default'  data-custom_markup=''  data-perma_caption=''  data-autoplay_stopper=''  data-image_attachment=''  data-min_height='110px'  data-lazy_loading='disabled'  data-src=''  data-position='top left'  data-repeat='no-repeat'  data-attach='scroll'  data-stretch=''  class='avia-slideshow avia-slideshow-1  av-control-default av-default-height-applied avia-slideshow-no scaling av_slideshow_full   avia-slide-slider '  itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><ul class='avia-slideshow-inner ' style='padding-bottom: 10.46875%;' ><li  class=' av-single-slide slide-1 ' ><div data-rel='slideshow-1' class='avia-slide-wrap '   ><div class = \"caption_fullwidth av-slideshow-caption caption_bottom\"><div class = \"container caption_container\"><div class = \"slideshow_caption\"><div class = \"slideshow_inner_caption\"><div class = \"slideshow_align_caption\"><h2  style='font-size:50px; ' class='avia-caption-title   av-small-font-size-overwrite av-small-font-size-36 av-mini-font-size-overwrite av-mini-font-size-24'  itemprop=\"name\" >Webinars<\/h2><\/div><\/div><\/div><\/div><\/div><img decoding=\"async\" class=\"wp-image-18676 avia-img-lazy-loading-not-18676\"  src=\"https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar.jpg\" width=\"1920\" height=\"201\" title='Banner Blue' alt=''  itemprop=\"thumbnailUrl\"  style='min-height:110px; min-width:1051px; ' srcset=\"https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar.jpg 1920w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-300x31.jpg 300w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-1030x108.jpg 1030w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-768x80.jpg 768w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-1536x161.jpg 1536w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-1500x157.jpg 1500w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-705x74.jpg 705w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-43x5.jpg 43w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-63x7.jpg 63w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-48x5.jpg 48w\" sizes=\"(max-width: 1920px) 100vw, 1920px\" \/><\/div><\/li><\/ul><\/div><\/div>\n<div id='av_section_1'  class='avia-section main_color avia-section-small avia-no-border-styling  avia-bg-style-scroll  avia-builder-el-1  el_after_av_slideshow_full  avia-builder-el-last   container_wrap fullsize' style='background-color: #ffffff;  margin-top:0px; margin-bottom:0px; '  ><div class='container' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-36169'><div class='entry-content-wrapper clearfix'>\n<div class='flex_column_table av-equal-height-column-flextable -flextable' style='margin-top:20px; margin-bottom:0px; '><div class=\"flex_column av_three_fourth  flex_column_table_cell av-equal-height-column av-align-top first  avia-builder-el-2  el_before_av_one_fourth  avia-builder-el-first  \" style='padding:0px 0px 0px 0px ; border-radius:0px; '><section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><h1>Simulation of Physical Etching in Memory Technology<\/h1>\n<p>This webinar will provide a deep insight into the methods, mechanisms and models to simulate physical etching with a special focus on memory technology. We will look into the simulation of very high aspect ratio narrow trench etching, which is among the key challenges in vertical non-volatile memory applications. The architecture and the modeling environment of Silvaco&#8217;s multi-dimensional process simulation tool Victory Process which embeds the physical etching capabilities will be demonstrated in detail. We will also show the flexibility of the open modeling system offered by Victory Process for adding new modeling features, which allows the engineer to optimally balance between the physical accuracy of a simulation and the simulation time requirements. On top of that, the fundamental properties of the ion enhanced chemical etching model which enables the simulation of high aspect ratio etching will be explained and analyzed and applications of it will be shown.<\/p>\n<h2>What attendees will learn:<\/h2>\n<ul id=\"web-bullet\">\n<li>Key challenges when performing physical etching simulations especially high aspect ratio trench etching<\/li>\n<li>The architecture of Victory Process<\/li>\n<li>The concept of the open model library for etching and deposition<\/li>\n<li>The implementation and extensions of models within the open model library of Victory Process<\/li>\n<li>The properties and behavior of the ion enhanced chemical etching model which is used for high aspect ratio narrow trench etching<\/li>\n<li>Applications such as\n<ul>\n<li>high aspect ratio etching in 3D NAND<\/li>\n<li>optimization of magnetic tunnel junction pillars in STT-MRAM<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<\/div><\/section><br \/>\n<div   class='hr hr-default   avia-builder-el-4  el_after_av_textblock  el_before_av_textblock '><span class='hr-inner ' ><span class='hr-inner-style'><\/span><\/span><\/div><br \/>\n<section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><h2>Presenter<\/h2>\n<\/div><\/section><br \/>\n<section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-5030 alignleft\" src=\"\/wp-content\/uploads\/2015\/12\/andreas.jpg\" alt=\"\" width=\"100\" height=\"100\" srcset=\"https:\/\/silvaco.com\/wp-content\/uploads\/2015\/12\/andreas.jpg 100w, https:\/\/silvaco.com\/wp-content\/uploads\/2015\/12\/andreas-80x80.jpg 80w, https:\/\/silvaco.com\/wp-content\/uploads\/2015\/12\/andreas-36x36.jpg 36w, https:\/\/silvaco.com\/wp-content\/uploads\/2015\/12\/andreas-37x37.jpg 37w, https:\/\/silvaco.com\/wp-content\/uploads\/2015\/12\/andreas-55x55.jpg 55w, https:\/\/silvaco.com\/wp-content\/uploads\/2015\/12\/andreas-48x48.jpg 48w\" sizes=\"(max-width: 100px) 100vw, 100px\" \/>Dr. Andreas H\u00f6ssinger is product manager within Silvaco&#8217;s TCAD Division. He is in charge of process simulation tool development including model development, numerical R&amp;D as well as the implementation of new applications. Prior to joining Silvaco, Dr. Andreas H\u00f6ssinger held a senior research position at the Vienna University of Technology, where he developed models, algorithms and methods for three-dimensional process simulation.<\/p>\n<p>Dr. Andreas H\u00f6ssinger holds a MS in physics and a PhD in electrical engineering for the Vienna University of Technology, Austria.<\/p>\n<\/div><\/section><br \/>\n<div   class='hr hr-default   avia-builder-el-7  el_after_av_textblock  avia-builder-el-last '><span class='hr-inner ' ><span class='hr-inner-style'><\/span><\/span><\/div><\/p><\/div><div class='av-flex-placeholder'><\/div><div class=\"flex_column av_one_fourth  flex_column_table_cell av-equal-height-column av-align-top   avia-builder-el-8  el_after_av_three_fourth  avia-builder-el-last  \" style='padding:0px 0px 0px 0px ; border-radius:0px; '><p><section class=\"av_textblock_section \"  id=\"date\"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><p><strong>When<\/strong>: April 28, 2016<br \/>\n<strong>Where<\/strong>: Online<br \/>\n<strong>Time<\/strong>: 10:00am-11:00am &#8211; (PST)<br \/>\n<strong>Language<\/strong>: English<\/p>\n<\/div><\/section><br \/>\n<div   class='hr hr-default   avia-builder-el-10  el_after_av_textblock  el_before_av_button '><span class='hr-inner ' ><span class='hr-inner-style'><\/span><\/span><\/div><br \/>\n<div  class='avia-button-wrap avia-button-center  avia-builder-el-11  el_after_av_hr  el_before_av_hr ' ><a href='\/dynamicweb\/jsp\/downloads\/DownloadDocStepsAction.do?req=silen-download&amp;nm=Physical_Etching_Simulation.mp4&amp;prefixname=video'  class='avia-button  avia-color-grey   avia-icon_select-no avia-size-small avia-position-center '   ><span class='avia_iconbox_title' >Register to View Archive<\/span><\/a><\/div><br \/>\n<div   class='hr hr-default   avia-builder-el-12  el_after_av_button  el_before_av_textblock '><span class='hr-inner ' ><span class='hr-inner-style'><\/span><\/span><\/div><br \/>\n<section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><h3>WHO SHOULD ATTEND:<\/h3>\n<\/div><\/section><br \/>\n<section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><p>Academics, engineers and management looking for solutions to analyze and optimize etching and deposition processing steps.<\/p>\n<\/div><\/section><\/p><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":5,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[7729],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v24.0 (Yoast SEO v24.0) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Simulation of Physical Etching in Memory Technology - Silvaco<\/title>\n<meta name=\"description\" content=\"This webinar will provide a deep insight into the methods, mechanisms and models to simulate physical etching with a special focus on memory technology.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/silvaco.com\/zh-hans\/tcad-zh-hans\/tcad-webinars-zh-hans\/simulation-of-physical-etching-in-memory-technology\/\" \/>\n<meta property=\"og:locale\" content=\"zh_CN\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Simulation of Physical Etching in Memory Technology\" \/>\n<meta property=\"og:description\" content=\"This webinar will provide a deep insight into the methods, mechanisms and models to simulate physical etching with a special focus on memory technology.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/silvaco.com\/zh-hans\/tcad-zh-hans\/tcad-webinars-zh-hans\/simulation-of-physical-etching-in-memory-technology\/\" \/>\n<meta property=\"og:site_name\" content=\"Silvaco\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/SilvacoSoftware\/\" \/>\n<meta property=\"article:published_time\" content=\"2016-04-28T16:17:25+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2021-10-13T16:57:16+00:00\" \/>\n<meta name=\"author\" content=\"Ingrid Schwarz\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:creator\" content=\"@SilvacoSoftware\" \/>\n<meta name=\"twitter:site\" content=\"@SilvacoSoftware\" \/>\n<meta name=\"twitter:label1\" content=\"\u4f5c\u8005\" \/>\n\t<meta name=\"twitter:data1\" content=\"Ingrid Schwarz\" \/>\n\t<meta name=\"twitter:label2\" content=\"\u9884\u8ba1\u9605\u8bfb\u65f6\u95f4\" \/>\n\t<meta name=\"twitter:data2\" content=\"7 \u5206\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/silvaco.com\/zh-hans\/tcad-zh-hans\/tcad-webinars-zh-hans\/simulation-of-physical-etching-in-memory-technology\/\",\"url\":\"https:\/\/silvaco.com\/zh-hans\/tcad-zh-hans\/tcad-webinars-zh-hans\/simulation-of-physical-etching-in-memory-technology\/\",\"name\":\"Simulation of Physical Etching in Memory Technology - 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