Improvement of Parasitic Capacitance Extraction Rules for Large-Scale Layout and Its Accuracy Verification Method

September 17, 2020 | 13:00 – 13:30 (JST) The accuracy of rule-based full-chip parasitic capacitance extraction tools including Silvaco's Hipex is highly dependent on the description of the rule files.

Validation of CLEVER Interconnect Parasitics with 0.18 µm Process Measurements Benoit Froment and Herve Jaouen – SGS-Thomson Microelectronics

CLEVER can perform accurate field solver extractions of resistance and capacitance from 3D structures generated from realistic process simulation. Comparison of CLEVER results with measurements made by SGS-Thomson Microelectronics were done to validate the simulator.