Q. Is there a way to automatically specify mesh spacing in ATHENA?
A. Yes, there are three ways to automatically specify grid spacing. The most preferred method is described below and could best be described as “semi-automatic”. The other methods not described below utilize the MaskViews/ATHENA interface and the adaptive meshing feature respectively.
1. Introduction
The topography simulation module, Elite has constantly been improved in order to simulate advanced processes, which are becoming more complex with device miniaturization and further integration of VLSI circuits. Elite is a two dimensional topography simulation module that works within ATHENA, and includes the etching and deposition models neccessary to simulate diverse modern technologies.
Polysilicon thin film transistors are attractive as active devices in driver circuits of highly integrated active-matrix liquid crystal displays (AMLCDs) and as p-channel metal-oxide-semiconductor field effect transistors (MOSFETs) in static random access memory (SRAM) cells.