• Simulation Standard Technical Journal

Simulation Standard

Technical Journal

A Journal for Process and Device Engineers

HINTS & TIPS – August 1998

When using the analytical implant tables in ATHENA the default model for the lateral implant range assumes a gaussian profile with a standard deviation equal to the vertical standard deviation (delta Rp) read from the table. This approximation is reasonable for amorphous implant substrates.

Simulating Redeposition During Etch Using a Monte Carlo Plasma Etch Model

The shrinking critical dimensions of modern technology place a heavy requirement on optimizing the etching of narrow mask opening. In addition the aspect ratio of etches has been increased requiring deeper etches along with the small CDs. The simulation of these process requires more advanced techniques than the directional rate-based etching found in the current versions of Elite. A more complete treatment involving calculation of the plasma distribution is required.

Fourier Transform Analysis for Large Signal Frequency Response in ATLAS

The ATLAS device simulation framework has been to improve the analysis the large signal transient behavior. These features include a simple specification for single frequency sinusoidal waveforms and frequency domain representation of large signal data. Applications include all classes of RF devices in both silicon and III-V technologies.

Simulating Accurate 3D Geometries for Interconnect Parasitic Extraction Using CLEVER

CLEVER is designed to model interconnect parasitics by simulating the back end processing steps of custom cells in three dimensions. A 3D process simulator is used to realisticly reproduce the effects of photolithography, deposition and etching on the resulting structure topography

HINTS & TIPS – July 1998

The traditional Noise models in SPICE used two parameters (AF and KF) to model the noise level and the frequency dependency of flicker noise in MOS devices. There are three different standard models and they can be activated using the noise level selector parameter NLEV in SPICE.

UTMOST File Format Extension

Following the log file conversion tool for TonyPlot introduced with UTMOST 12.3.14.R1, new file formats have been added to UTMOST III's printing and plotting options to make manipulating UTMOST generated data even easier.