DeckBuild, TonyPlot, and Virtual Wafer Fab (VWF)

The Interactive Tools are a suite of applications that provide interactive GUI-based pre and post processing services to Silvaco’s TCAD simulators. The tools within the interactive tools suite are fully integrated and provide users with a comfortable environment within which all TCAD simulations can be performed.

Benefits

Easy to use interface to all Silvaco TCAD Simulation solutions
Debug and visualization of TCAD simulation code, easy access to help, quick launch of results
Customization of runtime scripting including variables, loops, if/else statements and file control commands

Applications

Advanced CMOS&Bulk CMOS, PDSOI, FDSOI, FinFET
Power & RF&BCD, Power Diode, IGBT, Thyristor, GaN HEMT, SiC DMOS, SiC LMOS, etc
Display&Amorphous- and Poly-Si TFT, IGZO TFT, LED, OLED, MicroLED
Optoelectronics&CCD, CMOS Image Sensor, Avalanche Photodiode, PiN Photodiode, Solar Cell

Overview

Deckbuild allows users to build, debug, and run all Silvaco TCAD solutions
Tonyplot & Tonyplot3d are allow interactive visualization of TCAD results
Virtual Wafer Fab expands the user’s ability to maximize TCAD simulation throughput
- generate design-of-experiments to make any TCAD input a variable in a multi-variable experiment
- Optimize TCAD simulation against a scalar or vector target

TCAD Run-Time Environment

Deckbuild is an interactive, GUI-driven development and debugging of simulation decks
Streamline simulation flows by integrating all Silvaco simulators and TCAD visualization tools into one GUI
Powerful extraction language capable of measuring process and device parameters like thicknesses or voltages and to create all forms of 1D curves (IdVd / IdVg.)
Automated visualization of simulation created structures and extracted curves
Powerful post-processing engine, which allows the production of PDF reports and movies of simulation progress
Integrated Python-3 module to support advanced simulator control and extract mechanisms, and to implement custom GUI components
Powerful simulation flow editor allowing to combine individual simulation decks into complex hierarchical flow

Results Visualization

Tonyplot & Tonyplot3D allow visualization of all outputted TCAD results
Rotation and zooming by intuitive mouse actions
Point and click probing of points within the 3D structure
Plot surface contours and isosurfaces for any simulated variable
Cut-plane tool for creating 2D slices
Supports all common 1D and 2D data views including: 1D x-y data, 2D contour data, 2D meshed data, smith charts and polar charts
Integrated suite of probes, rulers, and other measurement tools allows detailed analysis of 1D and 2D structures
Animated markers allow quick visualization of vector quantities within devices
Function and macro editor allows complex functions and macros to be defined that can be visualized as normal 1D quantities, enabling calculation of M-plots for OLED devices

Design-of-Experiment & Optimization

Sub-threshold Slope Extraction for a MOSFET

TonyPlot 3D plots isosurfaces within FinFET 3D structure displaying electron concentration through transparent poly and gate oxide regions

TonyPlot can show all contours of 2D structures

Drain Current vs. Gate Voltage shown for 4 different process parameter combinations. Curves correspond to the selected cells 8.2, 8.5, 8.6, and 8.9 (red, green, dark blue, light blue).

TCAD Resources

Application Examples

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Presentations

DTCO Tool Flow – Single Run-Time Environment for Design Technology Co-Optimization
Optical Simulations – Light Emitting and Absorbing Devices
Power Device Solutions – Full TCAD to SPICE Flow
Parasitic Extraction – Full Chip and Cell Level RC Extraction
Process Simulation Options – Four Ways to Create a Physical Structure
Radiation Effects Module – Total Dose and Single Event Phenomenon, Damage Inducing and Elastic Interactions
Victory Atomistic – Practical Atomic-Scale Simulation

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Product Briefs

Victory Atomistic – Nanostructure Simulation	Interactive Tools – Pre and Post Processing Tools
Victory Device – Device Simulation	VWF – Virtual Wafer Fab
Victory Process – Process Simulation	Clever – Full-chip Rule-based RC Parasitic Extraction
Victory Mesh – Meshing & Solid Modeling	Hipex – RC Extractor for Realistic 3D Structures

Published Papers

Nanoscale Devices

Solar Cells

MEMS

Memory Devices

Optoelectronics

Radiation, SEU and Reliability

Power Device Simulation

ESD Simulation

Organic Device Technology

Interconnect Simulation

SOI Technology

TFT Technology

Compound Devices

CMOS Technology

Process Simulation

Bipolar Technology

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Simulation Standard

TCAD Investigation of Total Ionizing Dose (TID) Effects on Gallium Nitride HEMTs

Obtaining Spectral Sweeps from 3D Plasmonic Structures

Optimizing a 2um, 1,500 Volt SiC Superjunction Trench-MOS Device Using TCAD

TCAD Simulation of CBRAM Devices

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Webinars

How To Remesh with Victory Mesh for an Optimized TCAD Device Simulation

Resistive RAM Switching Analysis with Victory TCAD Solution

Optoelectronic Simulation of Solar Cells, Waveguides, and LEDs

Reducing Organic LED Fabrication Time and Cost via Multi-Scale Flow Simulation

TCAD of Innovative Nanodevices with Victory Atomistic

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Whitepapers

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Comprehensive Design Solutions for Display Technology

Download White Paper

Videos

News

Silvaco Acquires Physical Verification Solution Provider POLYTEDA CLOUD LLC

Industry Veterans Cathal Phelan, John Kent, and Michael Reiha Join Silvaco Technical Advisory Board

Silvaco and OPENEDGES Announce Availability of Integrated DDR Controller and PHY IP Solutions

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Blogs

Silvaco at Upcoming Solid-State Conferences – ESSDERC 2020 and SISPAD 2020

Accelerating Design with the Victory TCAD Suite

TCAD Simulations of RF-SOI Switches with Trap-Rich Substrate

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Customers

Coby Hanoch

Silvaco provides state-of-the-art device models and TCAD tools that are widely used by semiconductor companies. We are excited to establish this joint development program with Silvaco so customers will have early access to our ReRAM technology on the most powerful simulation tools in the industry and can fast-track the release of their next-generation products. This is another key step by Weebit Nano to accelerate the incorporation of ReRAM technology by a larger number of OEM customers.

Weebit Nano

CEO

Takashi Shinohe

We are developing gallium oxide devices with a completely new proprietary manufacturing method. Utilizing a device simulator will become important in order to efficiently develop such new devices. For the decision to use Silvaco’s device simulator, the deciding factors were Silvaco’s extensive track record with wide band gap semiconductors, and Silvaco’s depth of knowledge of power devices. We expect to see even more progress in our development of GaO™ power devices as we move toward practical applications.

FLOSFIA

CTO

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