Setting up the Wafer Orientation: Applications to Ion Implantation


Properly setting the wafer orientation in Victory Process (VP) is critical for various processes such as ion implantation, etching, and deposition. For ion implantation in particular, the determination of the wafer orientation becomes crucial, given its profound impact on profile variations in channeling and non-channeling directions. Additionally, understanding the effects of crystal orientation in different materials, especially those with diamond and hexagonal structures, is essential due to the multitude of specifications in commercially available wafers. It is the aim of this article to demonstrate how to properly configure a wafer for a VP simulation, particularly for ion implantation. Emphasis will also be placed on the underlying crystal structure of the wafer because of its critical role in ion implantation.