{"id":65832,"date":"2026-07-14T15:51:50","date_gmt":"2026-07-14T22:51:50","guid":{"rendered":"https:\/\/silvaco.com\/%eb%b6%84%eb%a5%98%eb%90%98%ec%a7%80-%ec%95%8a%ec%9d%8c\/simulation-of-plasma-chambers-for-predictive-simulation-of-semiconductor-manufacturing\/"},"modified":"2026-07-17T11:38:08","modified_gmt":"2026-07-17T18:38:08","slug":"simulation-of-plasma-chambers-for-predictive-simulation-of-semiconductor-manufacturing","status":"publish","type":"post","link":"https:\/\/silvaco.com\/ko\/webinars-ko\/simulation-of-plasma-chambers-for-predictive-simulation-of-semiconductor-manufacturing\/","title":{"rendered":"Simulation of Plasma Chambers for Predictive Simulation of Semiconductor Manufacturing"},"content":{"rendered":"<div id='template_slider'  class='avia-fullwidth-slider main_color avia-shadow   avia-builder-el-0  el_before_av_section  avia-builder-el-first   container_wrap fullsize' style=' '  ><div   data-size='no scaling'  data-lightbox_size='large'  data-animation='slide'  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av-slideshow-caption caption_bottom\"><div class = \"container caption_container\"><div class = \"slideshow_caption\"><div class = \"slideshow_inner_caption\"><div class = \"slideshow_align_caption\"><h2  style='font-size:50px; ' class='avia-caption-title   av-small-font-size-overwrite av-small-font-size-36 av-mini-font-size-overwrite av-mini-font-size-24'  itemprop=\"name\" >Webinars<\/h2><\/div><\/div><\/div><\/div><\/div><img decoding=\"async\" class=\"wp-image-18678 avia-img-lazy-loading-not-18678\"  src=\"https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar.jpg\" width=\"1920\" height=\"201\" title='Banner Blue' alt=''  itemprop=\"thumbnailUrl\"  style='min-height:110px; min-width:1051px; ' srcset=\"https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar.jpg 1920w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-300x31.jpg 300w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-1030x108.jpg 1030w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-768x80.jpg 768w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-1536x161.jpg 1536w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-1500x157.jpg 1500w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-705x74.jpg 705w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-43x5.jpg 43w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-63x7.jpg 63w, https:\/\/silvaco.com\/wp-content\/uploads\/2018\/12\/Webinar-48x5.jpg 48w\" sizes=\"(max-width: 1920px) 100vw, 1920px\" \/><\/div><\/li><\/ul><\/div><\/div>\n<div id='av_section_1'  class='avia-section main_color avia-section-small avia-no-border-styling  avia-bg-style-scroll  avia-builder-el-1  el_after_av_slideshow_full  avia-builder-el-last   container_wrap fullsize' style='background-color: #ffffff;  margin-top:0px; margin-bottom:0px; '  ><div class='container' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-65832'><div class='entry-content-wrapper clearfix'>\n<div class='flex_column_table av-equal-height-column-flextable -flextable' style='margin-top:20px; margin-bottom:0px; '><div class=\"flex_column av_three_fourth  flex_column_table_cell av-equal-height-column av-align-top first  avia-builder-el-2  el_before_av_one_fourth  avia-builder-el-first  \" style='padding:0px 0px 0px 0px ; border-radius:0px; '><section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><h1>Simulation of Plasma Chambers for Predictive Simulation of Semiconductor Manufacturing<\/h1>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-65818 alignright\" src=\"https:\/\/silvaco.com\/wp-content\/uploads\/2026\/07\/plasma_fig.jpg\" alt=\"\" width=\"368\" height=\"243\" srcset=\"https:\/\/silvaco.com\/wp-content\/uploads\/2026\/07\/plasma_fig.jpg 432w, https:\/\/silvaco.com\/wp-content\/uploads\/2026\/07\/plasma_fig-300x199.jpg 300w, https:\/\/silvaco.com\/wp-content\/uploads\/2026\/07\/plasma_fig-43x28.jpg 43w, https:\/\/silvaco.com\/wp-content\/uploads\/2026\/07\/plasma_fig-63x42.jpg 63w, https:\/\/silvaco.com\/wp-content\/uploads\/2026\/07\/plasma_fig-48x32.jpg 48w\" sizes=\"(max-width: 368px) 100vw, 368px\" \/>Process engineers, plasma chamber designers, and plasma device users are faced with the challenge of designing optimal geometric configurations, with uniformity over larger regions, more focused plasma etching distributions, and better powering characteristics.\u00a0 Physical prototyping is untenable, given the expense of chamber manufacture and even switchover from one working gas\/chemistry to another.\u00a0 To understand these situations, kinetic (velocity-distribution capturing) simulations are required, as only they properly account for the non-thermal nature of the particle distribution \u2013 the electron distribution has energy dropouts at, e.g., ionization and excitation energies, while both the electron and ion distributions are highly non-thermal at the plasma edges, where there are sheaths with flows.<\/p>\n<p>This webinar presents Silvaco&#8217;s plasma simulator VSim, which allows engineers to explore parameter space, test new geometries, and explore new processes for plasma devices without modifying their physical systems or their setup.\u00a0 VSim uses a particle-in-cell (PIC) algorithm, which captures the full kinetics of the particle distributions.\u00a0 VSim further generates the particle distributions in both the direct form of histograms and in a reduced form of overall and energy dependent von Mises-Fisher distributions that can be imported into Victory Process, a feature-scale simulator, for predicting semiconductor devices as manufactured.<\/p>\n<h3><strong>What You Will Learn<\/strong><\/h3>\n<ul>\n<li>How to simulate plasmas, in particular etching chambers, and extract physical data, like the ion energy and angular distribution function.<\/li>\n<li>How waveforms can affect the ion distribution function that does the etching.<\/li>\n<li>How to build a complete workflow from geometry setup to process modeling for devices.<\/li>\n<\/ul>\n<\/div><\/section><br \/>\n<div   class='hr hr-default   avia-builder-el-4  el_after_av_textblock  el_before_av_textblock '><span class='hr-inner ' ><span class='hr-inner-style'><\/span><\/span><\/div><br \/>\n<section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><h2>Presenter<\/h2>\n<\/div><\/section><br \/>\n<section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><p><img loading=\"lazy\" decoding=\"async\" class=\" wp-image-65822 alignleft\" src=\"https:\/\/silvaco.com\/wp-content\/uploads\/2026\/07\/JohnC_Headshot.png\" alt=\"\" width=\"137\" height=\"160\" srcset=\"https:\/\/silvaco.com\/wp-content\/uploads\/2026\/07\/JohnC_Headshot.png 200w, https:\/\/silvaco.com\/wp-content\/uploads\/2026\/07\/JohnC_Headshot-32x37.png 32w, https:\/\/silvaco.com\/wp-content\/uploads\/2026\/07\/JohnC_Headshot-47x55.png 47w, https:\/\/silvaco.com\/wp-content\/uploads\/2026\/07\/JohnC_Headshot-41x48.png 41w\" sizes=\"(max-width: 137px) 100vw, 137px\" \/><\/p>\n<p><strong>John Cary<\/strong><br \/>\n<strong>Senior Director and Fellow, Silvaco<\/strong><\/p>\n<p>John Cary is a Senior Director and Fellow at Silvaco specializing in plasma simulation and photonics simulation, as well as design of computational applications and workflows for plasma and photonics modeling. \u00a0John directs Silvaco\u2019s TCAD\/HPC group, which specializes in massively parallel computing for plasmas and electromagnetics, including photonics, combined with device (GPU) based computing, including on the cloud.\u00a0 His technical interests include photonics, plasmas, and algorithm development.\u00a0 John has a PhD in Plasma Physics from the University of California, Berkeley.\u00a0 He is a fellow of the American Physical Society (APS) and a former Chair of the Division on Plasma Physics of the APS.\u00a0 He founded Tech-X Corporation, which was acquired by Silvaco in 2025.<\/p>\n<\/div><\/section><br \/>\n<div   class='hr hr-default   avia-builder-el-7  el_after_av_textblock  el_before_av_textblock '><span class='hr-inner ' ><span class='hr-inner-style'><\/span><\/span><\/div><br \/>\n<section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><h3>WHO SHOULD ATTEND:<\/h3>\n<\/div><\/section><br \/>\n<section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><p>Process engineers, plasma chamber designers, device fabricators, and engineering management.<\/p>\n<\/div><\/section><\/p><\/div><div class='av-flex-placeholder'><\/div><div class=\"flex_column av_one_fourth  flex_column_table_cell av-equal-height-column av-align-top av-zero-column-padding   avia-builder-el-10  el_after_av_three_fourth  avia-builder-el-last  \" style='border-radius:0px; '><p><section class=\"av_textblock_section \"  id=\"date\"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><p><strong>When<\/strong>: August 6, 2026<br \/>\n<strong>Where<\/strong>: Online<br \/>\n<strong>Time<\/strong>: 10:00 Santa Clara<br \/>\n<strong>Time<\/strong>: 11:00 Paris<br \/>\n<strong>Time<\/strong>: 10:00 Beijing<br \/>\n<strong>Language<\/strong>: English<\/p>\n<\/div><\/section><br \/>\n<div   class='hr hr-default   avia-builder-el-12  el_after_av_textblock  el_before_av_codeblock '><span class='hr-inner ' ><span class='hr-inner-style'><\/span><\/span><\/div><br \/>\n<br \/>\n<div  class='avia-button-wrap avia-button-center  avia-builder-el-14  el_after_av_codeblock  el_before_av_hr  mfp-hide' ><a href='\/dynamicweb\/jsp\/downloads\/DownloadDocStepsAction.do?req=silen-download&amp;nm=Machine_Learning_in_the_EDA_Specific_Domain.mp4&amp;prefixname=video'  class='avia-button  avia-color-grey   avia-icon_select-no avia-size-small avia-position-center '   ><span class='avia_iconbox_title' >Register to View Archive<\/span><\/a><\/div><br \/>\n<div   class='hr hr-default   avia-builder-el-15  el_after_av_button  avia-builder-el-last '><span class='hr-inner ' ><span class='hr-inner-style'><\/span><\/span><\/div><\/p><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n","protected":false},"excerpt":{"rendered":"<p><b>Registration Now Open<\/b><\/p>\n","protected":false},"author":8,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[7574,7571],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v24.0 (Yoast SEO v24.0) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Simulation of Plasma Chambers for Predictive Semiconductor<\/title>\n<meta name=\"description\" content=\"Join Silvaco&#039;s webinar on plasma chamber simulation using VSim. 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