{"id":31234,"date":"2003-08-01T23:43:36","date_gmt":"2003-08-01T23:43:36","guid":{"rendered":"https:\/\/silvaco.com\/%eb%b6%84%eb%a5%98%eb%90%98%ec%a7%80-%ec%95%8a%ec%9d%8c\/the-effect-of-carrier-spilling-on-spreading-resistance-profiling-srp-accuracy\/"},"modified":"2023-08-10T12:30:44","modified_gmt":"2023-08-10T19:30:44","slug":"the-effect-of-carrier-spilling-on-spreading-resistance-profiling-srp-accuracy","status":"publish","type":"post","link":"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/the-effect-of-carrier-spilling-on-spreading-resistance-profiling-srp-accuracy\/","title":{"rendered":"The Effect of Carrier Spilling on Spreading Resistance Profiling (SRP) Accuracy"},"content":{"rendered":"<div id='template_overview'  class='avia-section main_color avia-section-small avia-no-border-styling  avia-bg-style-scroll  avia-builder-el-0  avia-builder-el-no-sibling   container_wrap fullsize' style='background-color: #ffffff;  margin-top:0px; margin-bottom:0px; '  ><div class='container' ><main  role=\"main\" itemprop=\"mainContentOfPage\"  class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-31234'><div class='entry-content-wrapper clearfix'>\n<div class='flex_column_table av-equal-height-column-flextable -flextable' style='margin-top:20px; margin-bottom:0px; '><div class=\"flex_column av_three_fourth  flex_column_table_cell av-equal-height-column av-align-top first  avia-builder-el-1  el_before_av_one_fourth  avia-builder-el-first  \" style='padding:0px 0px 0px 0px ; border-radius:0px; '><section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><h1>The Effect of Carrier Spilling on Spreading Resistance Profiling (SRP) Accuracy<\/h1>\n<h3>Introduction<\/h3>\n<p>Spreading Resistance Profiling (SRP) retains its popularity in the semiconductor industry by an inexpensive means of capturing dopant profile information. However, device engineers often incorporate SRP data into process simulation studies without properly considering SRP\u2019s many limitations. Failing to account for these limitations jeopardizes the reliability of the data and potentially lead designers to incorrect conclusions about a device.<\/p>\n<p>This article briefly reviews the general concepts behind spreading resistance profiling and analyzes the impact of carrier spilling on both simulation studies and SRP accuracy. Finally, this article demonstrates how to reliably and accurately into a simulation study. The purpose of this article is not to discourage the use of SRP measurements, but rather to offer suggestions for using SRP measurements in order to obtain the most accurate results.<\/p>\n<\/div><\/section><\/div><div class='av-flex-placeholder'><\/div><div class=\"flex_column av_one_fourth  flex_column_table_cell av-equal-height-column av-align-top av-zero-column-padding   avia-builder-el-3  el_after_av_three_fourth  avia-builder-el-last  \" style='border-radius:0px; ' id=\"whitepaper\" ><p><div  class='avia-builder-widget-area clearfix  avia-builder-el-4  el_before_av_image  avia-builder-el-first '><div id=\"nav_menu-29\" class=\"widget clearfix widget_nav_menu\"><div class=\"menu-simulation-standard-side-menu-korean-container\"><ul id=\"menu-simulation-standard-side-menu-korean\" class=\"menu\"><li id=\"menu-item-25039\" class=\"menu-item menu-item-type-post_type menu-item-object-page menu-item-25039\"><a href=\"https:\/\/silvaco.com\/ko\/technical-library\/simulation-standard\/\">Simulation Standard<\/a><\/li>\n<\/ul><\/div><\/div><\/div><br \/>\n<div  class='avia-image-container  av-styling-    avia-builder-el-5  el_after_av_sidebar  el_before_av_button  avia-align-center '  itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\"  ><div class='avia-image-container-inner'><div class='avia-image-overlay-wrap'><a href=\"\/dynamicweb\/jsp\/downloads\/DownloadDocStepsAction.do?req=download&amp;nm=simstd_aug_2003_a1.pdf \" class='avia_image' target=\"_blank\" rel=\"noopener noreferrer\"><img decoding=\"async\" width=\"600\" height=\"800\" class='wp-image-21594 avia-img-lazy-loading-not-21594 avia_image' src=\"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_aug_2003_a1-e1611193725204.jpg\" alt='' title='simstd_aug_2003_a1'  itemprop=\"thumbnailUrl\"  \/><\/a><\/div><\/div><\/div><br \/>\n<div  class='avia-button-wrap avia-button-center  avia-builder-el-6  el_after_av_image  avia-builder-el-last ' ><a href='\/dynamicweb\/jsp\/downloads\/DownloadDocStepsAction.do?req=download&amp;nm=simstd_aug_2003_a1.pdf ' class='avia-button  avia-color-grey   avia-icon_select-yes-right-icon avia-size-small avia-position-center ' target=\"_blank\" rel=\"noopener noreferrer\"><span class='avia_iconbox_title' >Download Simulation Standard<\/span><span class='avia_button_icon avia_button_icon_right' aria-hidden='true' data-av_icon='\ue875' data-av_iconfont='entypo-fontello'><\/span><\/a><\/div><\/p><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n","protected":false},"excerpt":{"rendered":"<p>Spreading Resistance Profiling (SRP) retains its popularity in the semiconductor industry by an inexpensive means of capturing dopant profile information. However, device engineers often incorporate SRP data into process simulation studies without properly considering SRP\u2019s many limitations. Failing to account for these limitations jeopardizes the reliability of the data and potentially lead designers to incorrect conclusions about a device.<\/p>\n","protected":false},"author":2,"featured_media":21594,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[7486],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v24.0 (Yoast SEO v24.0) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>The Effect of Carrier Spilling on Spreading Resistance Profiling (SRP) Accuracy - Silvaco<\/title>\n<meta name=\"description\" content=\"The Effect of Carrier Spilling on Spreading Resistance Profiling (SRP) Accuracy\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/the-effect-of-carrier-spilling-on-spreading-resistance-profiling-srp-accuracy\/\" \/>\n<meta property=\"og:locale\" content=\"ko_KR\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"The Effect of Carrier Spilling on Spreading Resistance Profiling (SRP) Accuracy\" \/>\n<meta property=\"og:description\" content=\"The Effect of Carrier Spilling on Spreading Resistance Profiling (SRP) Accuracy\" \/>\n<meta property=\"og:url\" content=\"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/the-effect-of-carrier-spilling-on-spreading-resistance-profiling-srp-accuracy\/\" \/>\n<meta property=\"og:site_name\" content=\"Silvaco\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/SilvacoSoftware\/\" \/>\n<meta property=\"article:published_time\" content=\"2003-08-01T23:43:36+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2023-08-10T19:30:44+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_aug_2003_a1-e1611193725204.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"600\" \/>\n\t<meta property=\"og:image:height\" content=\"800\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"author\" content=\"Graham Bell\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:creator\" content=\"@SilvacoSoftware\" \/>\n<meta name=\"twitter:site\" content=\"@SilvacoSoftware\" \/>\n<meta name=\"twitter:label1\" content=\"\uae00\uc4f4\uc774\" \/>\n\t<meta name=\"twitter:data1\" content=\"Graham Bell\" \/>\n\t<meta name=\"twitter:label2\" content=\"\uc608\uc0c1 \ub418\ub294 \ud310\ub3c5 \uc2dc\uac04\" \/>\n\t<meta name=\"twitter:data2\" content=\"4\ubd84\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/the-effect-of-carrier-spilling-on-spreading-resistance-profiling-srp-accuracy\/\",\"url\":\"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/the-effect-of-carrier-spilling-on-spreading-resistance-profiling-srp-accuracy\/\",\"name\":\"The Effect of Carrier Spilling on Spreading Resistance Profiling (SRP) Accuracy - 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