{"id":31056,"date":"2005-11-01T00:05:51","date_gmt":"2005-11-01T00:05:51","guid":{"rendered":"https:\/\/silvaco.com\/%eb%b6%84%eb%a5%98%eb%90%98%ec%a7%80-%ec%95%8a%ec%9d%8c\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/"},"modified":"2026-10-15T14:17:57","modified_gmt":"2026-10-15T21:17:57","slug":"how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis","status":"publish","type":"post","link":"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/","title":{"rendered":"How can I create a non planar structure using III-V materials for Device Analysis"},"content":{"rendered":"<h1>Hints, Tips and Solutions &#8211; November 2005<\/h1>\n<p><strong>Q.<\/strong>\u00a0How can I create a non planar structure using III-V materials for Device Analysis when the materials I want to use are not in the\u00a0<em>ATHENA<\/em>\u00a0data base.<\/p>\n<p><strong>A.<\/strong>\u00a0There are many materials in the\u00a0<strong><em>ATLAS<\/em><\/strong>\u00a0device simulator data base that are not in the\u00a0<strong><em>ATHENA<\/em><\/strong>\u00a0database, primarily because most of these exotic materials are usually deposited epitaxially and very little actual processing takes place in terms of implantation, diffusion and heat treatments.<\/p>\n<p>However, it is often desired to create a device with non vertical side-walls or a device where a non planar realistic deposit of an inter-layer di-electric plays a key role in the device operation. In these circumstances it is necessary to use the\u00a0<strong><em>ATHENA<\/em><\/strong>\u00a0process simulator. However, if the process simulator does not contain the exotic materials of interest in it\u2019s process data base, a user defined material must be used.<\/p>\n<p>There is a special feature in the Silvaco process simulator,\u00a0<strong><em>ATHENA<\/em><\/strong>\u00a0, which converts unknown user defined materials into known device simulator materials so long as the user defined material is given the exact same name as the known device simulator material.<\/p>\n<p>All that is required now to complete device construction in the process simulator,\u00a0<strong><em>ATHENA<\/em><\/strong>\u00a0, is to define the dopant materials as either donor or acceptor using the impurity statement.<\/p>\n<p>An example of the first few lines of an\u00a0<strong><em>ATHENA<\/em><\/strong>\u00a0deck is given below. The example demonstrates how to define the user defined material as both the starting substrate material and as a deposited layer<\/p>\n<p><img loading=\"lazy\" width=\"644\" height=\"800\" src=\"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_2005_hints-e1611194748751.jpg\" class=\"cleaned-enfold-image\" alt=\"\" decoding=\"async\" loading=\"lazy\" \/><\/p>\n<p><a href=\"https:\/\/silvaco.com\/dynamicweb\/jsp\/downloads\/DownloadDocStepsAction.do?req=download&#038;nm=simstd_nov_2005_hints.pdf\" class=\"BGT-btn\" target=\"_blank\" rel=\"noopener noreferrer\">Download Simulation Standard<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>How can I create a non planar structure using III-V materials for Device Analysis when the materials I want to use are not in the\u00a0ATHENA\u00a0data base.<\/p>\n","protected":false},"author":12,"featured_media":22365,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"inline_featured_image":false,"footnotes":""},"categories":[7486],"tags":[],"class_list":["post-31056","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-simulation-standard-ko","entry","has-media"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v28.7 (Yoast SEO v28.7) - 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Silvaco","description":"How can I create a non planar structure using III-V materials for Device Analysis when the materials I want to use are not in the\u00a0ATHENA\u00a0data base.","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/","og_locale":"ko_KR","og_type":"article","og_title":"How can I create a non planar structure using III-V materials for Device Analysis","og_description":"How can I create a non planar structure using III-V materials for Device Analysis when the materials I want to use are not in the\u00a0ATHENA\u00a0data base.","og_url":"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/","og_site_name":"Silvaco","article_publisher":"https:\/\/www.facebook.com\/SilvacoSoftware\/","article_published_time":"2005-11-01T00:05:51+00:00","article_modified_time":"2026-10-15T21:17:57+00:00","og_image":[{"width":644,"height":800,"url":"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_2005_hints-e1611194748751.jpg","type":"image\/jpeg"}],"author":"Casey Molver","twitter_card":"summary_large_image","twitter_creator":"@SilvacoSoftware","twitter_site":"@SilvacoSoftware","twitter_misc":{"\uae00\uc4f4\uc774":"Casey Molver","\uc608\uc0c1 \ub418\ub294 \ud310\ub3c5 \uc2dc\uac04":"1 minute"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/#article","isPartOf":{"@id":"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/"},"author":{"name":"Casey Molver","@id":"https:\/\/silvaco.com\/ja\/#\/schema\/person\/2763eb741ca5ac04477fdff50ed84c80"},"headline":"How can I create a non planar structure using III-V materials for Device Analysis","datePublished":"2005-11-01T00:05:51+00:00","dateModified":"2026-10-15T21:17:57+00:00","mainEntityOfPage":{"@id":"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/"},"wordCount":274,"image":{"@id":"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/#primaryimage"},"thumbnailUrl":"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_2005_hints-e1611194748751.jpg","articleSection":["Simulation Standard"],"inLanguage":"ko-KR"},{"@type":"WebPage","@id":"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/","url":"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/","name":"How can I create a non planar structure using III-V materials for Device Analysis - Silvaco","isPartOf":{"@id":"https:\/\/silvaco.com\/ja\/#website"},"primaryImageOfPage":{"@id":"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/#primaryimage"},"image":{"@id":"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/#primaryimage"},"thumbnailUrl":"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_2005_hints-e1611194748751.jpg","datePublished":"2005-11-01T00:05:51+00:00","dateModified":"2026-10-15T21:17:57+00:00","author":{"@id":"https:\/\/silvaco.com\/ja\/#\/schema\/person\/2763eb741ca5ac04477fdff50ed84c80"},"description":"How can I create a non planar structure using III-V materials for Device Analysis when the materials I want to use are not in the\u00a0ATHENA\u00a0data base.","breadcrumb":{"@id":"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/#breadcrumb"},"inLanguage":"ko-KR","potentialAction":[{"@type":"ReadAction","target":["https:\/\/silvaco.com\/ko\/simulation-standard-ko\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/"]}]},{"@type":"ImageObject","inLanguage":"ko-KR","@id":"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/#primaryimage","url":"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_2005_hints-e1611194748751.jpg","contentUrl":"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_2005_hints-e1611194748751.jpg","width":644,"height":800},{"@type":"BreadcrumbList","@id":"https:\/\/silvaco.com\/ko\/simulation-standard-ko\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/silvaco.com\/zh-hans\/%e9%a6%96%e9%a1%b5\/"},{"@type":"ListItem","position":2,"name":"How can I create a non planar structure using III-V materials for Device Analysis"}]},{"@type":"WebSite","@id":"https:\/\/silvaco.com\/ja\/#website","url":"https:\/\/silvaco.com\/ja\/","name":"Silvaco","description":"","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/silvaco.com\/ja\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"ko-KR"},{"@type":"Person","@id":"https:\/\/silvaco.com\/ja\/#\/schema\/person\/2763eb741ca5ac04477fdff50ed84c80","name":"Casey Molver","image":{"@type":"ImageObject","inLanguage":"ko-KR","@id":"https:\/\/secure.gravatar.com\/avatar\/3dba2e48e0c4a977ea23fa75d38750a7763843df78307070478340a2517b8d6b?s=96&d=blank&r=g","url":"https:\/\/secure.gravatar.com\/avatar\/3dba2e48e0c4a977ea23fa75d38750a7763843df78307070478340a2517b8d6b?s=96&d=blank&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/3dba2e48e0c4a977ea23fa75d38750a7763843df78307070478340a2517b8d6b?s=96&d=blank&r=g","caption":"Casey Molver"},"url":"https:\/\/silvaco.com\/ko\/author\/caseym\/"}]}},"_links":{"self":[{"href":"https:\/\/silvaco.com\/ko\/wp-json\/wp\/v2\/posts\/31056","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/silvaco.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/silvaco.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/silvaco.com\/ko\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/silvaco.com\/ko\/wp-json\/wp\/v2\/comments?post=31056"}],"version-history":[{"count":2,"href":"https:\/\/silvaco.com\/ko\/wp-json\/wp\/v2\/posts\/31056\/revisions"}],"predecessor-version":[{"id":955281,"href":"https:\/\/silvaco.com\/ko\/wp-json\/wp\/v2\/posts\/31056\/revisions\/955281"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/silvaco.com\/ko\/wp-json\/wp\/v2\/media\/22365"}],"wp:attachment":[{"href":"https:\/\/silvaco.com\/ko\/wp-json\/wp\/v2\/media?parent=31056"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/silvaco.com\/ko\/wp-json\/wp\/v2\/categories?post=31056"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/silvaco.com\/ko\/wp-json\/wp\/v2\/tags?post=31056"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}