{"id":30944,"date":"2010-10-01T16:11:54","date_gmt":"2010-10-01T16:11:54","guid":{"rendered":"https:\/\/silvaco.com\/%eb%b6%84%eb%a5%98%eb%90%98%ec%a7%80-%ec%95%8a%ec%9d%8c\/using-victory-process-for-plasma-etching-simulations\/"},"modified":"2021-07-16T21:44:21","modified_gmt":"2021-07-17T04:44:21","slug":"using-victory-process-for-plasma-etching-simulations","status":"publish","type":"post","link":"https:\/\/silvaco.com\/ko\/simulation-standard\/using-victory-process-for-plasma-etching-simulations\/","title":{"rendered":"Using VICTORY Process for Plasma Etching Simulations"},"content":{"rendered":"
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Using VICTORY Process for Plasma Etching Simulations<\/h1>\n

Introduction<\/strong><\/p>\n

VICTORY Process, the 3D process simulator now includes a module for plasma etching. The module is designed to simulate plasma etching processes at the feature-scale size. The simulation in the reactor-scale region is out of the scope of VICTORY Process. All transport characteristics data (as functions of reactor parameters needed for the feature-scale simulation) are modeled by user definable C-functions and are supplied to the module. The plasma etching simulator shares many elements with the standard physical etching \/deposition module such as:<\/p>\n