VICTORY Process, the 3D process simulator now includes a module for plasma etching. The module is designed to simulate plasma etching processes at the feature-scale size. The simulation in the reactor-scale region is out of the scope of VICTORY Process. All transport characteristics data (as functions of reactor parameters needed for the feature-scale simulation) are modeled by user definable C-functions and are supplied to the module. The plasma etching simulator shares many elements with the standard physical etching \/deposition module such as:<\/p>\n
- \n
- The topology of a given feature, defined by its layers of various materials, as described by level set functions given on Cartesian meshes<\/li>\n
- All fine details of the structure are captured on imbedded finer meshes, and automatic and\/or manual adaptive mesh refinement is available<\/li>\n
- Particles fluxes, etch rates for different materials and types of particles involved in the process are modeled by appropriate functions, which are implemented in the user accessible C-Interpreter model library<\/li>\n
- All feature topological changes caused by the plasma etching process during a given time are captured by the solution of the corresponding partial differential equations acting on the level set functions<\/li>\n
- A feature\u2019s structure is automatically updated after the simulation time has expired<\/li>\n<\/ul>\n
![\"\"](\"https:\/\/silvaco.com\/wp-content\/uploads\/2020\/03\/simstd_Q4_2010_a1.jpg\")
<\/p>\n","protected":false},"excerpt":{"rendered":"VICTORY Process, the 3D process simulator now includes a module for plasma etching. The module is designed to simulate plasma etching processes at the feature-scale size. The simulation in the reactor-scale region is out of the scope of VICTORY Process. All transport characteristics data (as functions of reactor parameters needed for the feature-scale simulation) are modeled by user definable C-functions and are supplied to the module. The plasma etching simulator shares many elements with the standard physical etching \/deposition module such as:<\/p>\n","protected":false},"author":5,"featured_media":19614,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"inline_featured_image":false,"footnotes":""},"categories":[7486],"tags":[],"class_list":["post-30944","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-simulation-standard-ko","entry","has-media"],"yoast_head":"\n
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