{"id":28233,"date":"2019-09-04T16:45:12","date_gmt":"2019-09-04T16:45:12","guid":{"rendered":"https:\/\/silvaco.com\/%eb%b6%84%eb%a5%98%eb%90%98%ec%a7%80-%ec%95%8a%ec%9d%8c\/3d-tcad-simulation-for-power-devices\/"},"modified":"2019-09-04T16:45:12","modified_gmt":"2019-09-04T16:45:12","slug":"3d-tcad-simulation-for-power-devices","status":"publish","type":"post","link":"https:\/\/silvaco.com\/ko\/tcad-ko\/tcad-blogs-ko\/3d-tcad-simulation-for-power-devices\/","title":{"rendered":"3D TCAD Simulation for Power Devices"},"content":{"rendered":"<div id='template_overview'  class='avia-section main_color avia-section-small avia-no-border-styling  avia-bg-style-scroll  avia-builder-el-0  avia-builder-el-no-sibling   container_wrap fullsize' style='background-color: #ffffff;  margin-top:0px; margin-bottom:0px; '  ><div class='container' ><main  role=\"main\" itemprop=\"mainContentOfPage\"  class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-28233'><div class='entry-content-wrapper clearfix'>\n<div class='flex_column_table av-equal-height-column-flextable -flextable' style='margin-top:20px; margin-bottom:0px; '><div class=\"flex_column av_three_fourth  flex_column_table_cell av-equal-height-column av-align-top first  avia-builder-el-1  el_before_av_one_fourth  avia-builder-el-first  \" style='padding:0px 0px 0px 0px ; border-radius:0px; '><section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><h1>3D TCAD Simulation for Power Devices<\/h1>\n<p style=\"box-sizing: border-box; margin: 0px 0px 20px; line-height: 24px; letter-spacing: normal; color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial;\"><strong>*** This article by\u00a0<\/strong><a href=\"https:\/\/semiwiki.com\/forum\/index.php?members\/daniel-payne.57\/\" target=\"_blank\" rel=\"noreferrer noopener\"><strong>Daniel Payne<\/strong><\/a><strong>\u00a0was first published on\u00a0<\/strong><a href=\"https:\/\/semiwiki.com\/eda\/silvaco\/274459-3d-tcad-simulation-for-power-devices\/\" target=\"_blank\" rel=\"noreferrer noopener\"><strong>SemiWiki.com<\/strong><\/a><strong>\u00a0***<\/strong><\/p>\n<p style=\"box-sizing: border-box; margin: 0px 0px 20px; line-height: 24px; letter-spacing: normal; color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial;\">My first IC design back in 1978 was a DRAM and it ran on 12V, 5V and -5V, but then my second DRAM was using only a 5V supply. Today we see SOCs running under a 1V supply voltage, but there is a totally different market for\u00a0<strong>power devices<\/strong>\u00a0that are at the other end of the voltage spectrum and they handle switching ranges from 12V \u2013 250V. To learn more about power devices and how the process and device modeling is done, I read a\u00a0<strong>Silvaco<\/strong>\u00a0publication entitled\u00a0<a href=\"https:\/\/silvaco.com\/simulation-standard\/advanced-process-and-device-3d-tcad-simulation-of-split-gate-trench-umosfet\/\"><em>Advanced Process and Device 3D TCAD Simulation of Split-Gate Trench UMOSFET<\/em><\/a>.<\/p>\n<p>For vertical discrete power MOSFETs there are two important specifications that engineers look at:<\/p>\n<ul style=\"box-sizing: border-box; margin-top: 0px; margin-bottom: 1rem; color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial;\">\n<li>Breakdown voltage (BV)<\/li>\n<li>Specific on-state resistance (RSP)<\/li>\n<\/ul>\n<p style=\"box-sizing: border-box; margin: 0px 0px 20px; line-height: 24px; letter-spacing: normal; color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial;\">A couple of approaches have been used for power devices: Trench MOSFETs, RSO MOSFETs. The winning approach has been the Split-Gate RSO MOSFETs because of their low channel resistance, plus ultra-low drift region resistance with a smaller Cgd (gate-to-drain capacitance), improving switching speeds. Process engineers use 3D TCAD tools to model power devices and optimize them by looking at the predicted values of:<\/p>\n<ul style=\"box-sizing: border-box; margin-top: 0px; margin-bottom: 1rem; color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial;\">\n<li>Capacitance-Voltage (C-V)<\/li>\n<li>Current-Voltage (I-V)<\/li>\n<li>Breakdown Voltage (BV)<\/li>\n<\/ul>\n<p style=\"box-sizing: border-box; margin: 0px 0px 20px; line-height: 24px; letter-spacing: normal; color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial;\">Silvaco provides\u00a0Victory Process\u00a0and\u00a0Victory Device\u00a0simulators to do this modeling of power devices. So let\u2019s start with a 3D process simulation of a Split-Gate UMOSFET, where Victory Process is used to build the device structure. Several simulated process steps\u00a0 are shown below:<br \/>\na) Formation of a deep trench with rounded bottom, both dry and wet etch steps<br \/>\nb) Shield oxide growth<br \/>\nc) Shield poly deposition<br \/>\nd) Inter-poly oxide deposition and etch back<br \/>\ne) Gate poly deposition and etch back<br \/>\nf) Core contact etching and deposition of the contact plug<\/p>\n<div id=\"attachment_8526\" style=\"width: 560px\" class=\"wp-caption aligncenter\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-8526\" class=\"wp-image-8526 size-full\" src=\"\/wp-content\/uploads\/2020\/04\/Blog15.jpg\" alt=\"\" width=\"550\" height=\"663\" srcset=\"https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog15.jpg 550w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog15-249x300.jpg 249w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog15-31x37.jpg 31w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog15-46x55.jpg 46w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog15-40x48.jpg 40w\" sizes=\"(max-width: 550px) 100vw, 550px\" \/><p id=\"caption-attachment-8526\" class=\"wp-caption-text\">Victory Process simulation of key process steps to fabricate the Split-Gate UMOSFET<\/p><\/div>\n<p><span style=\"color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial; display: inline !important; float: none;\">A 3D numerical mesh is the next step using the\u00a0<\/span>Victory Mesh<span style=\"color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial; display: inline !important; float: none;\">\u00a0tool, and a 3D Delaunay mesh was generated to accurately resolve the 3D geometrical features. Here\u2019s the result of meshing:<\/span><\/p>\n<div id=\"attachment_8527\" style=\"width: 560px\" class=\"wp-caption aligncenter\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-8527\" class=\"wp-image-8527 size-full\" src=\"\/wp-content\/uploads\/2020\/04\/Blog16.jpg\" alt=\"\" width=\"550\" height=\"592\" srcset=\"https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog16.jpg 550w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog16-279x300.jpg 279w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog16-34x37.jpg 34w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog16-51x55.jpg 51w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog16-45x48.jpg 45w\" sizes=\"(max-width: 550px) 100vw, 550px\" \/><p id=\"caption-attachment-8527\" class=\"wp-caption-text\">Delaunay mesh to resolve complex 3D geometry features (a) and doping profiles (b)<\/p><\/div>\n<p style=\"box-sizing: border-box; margin: 0px 0px 20px; line-height: 24px; letter-spacing: normal; color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial;\">3D device simulations are then run with the Victory Device simulator, and this is quite powerful because it can model 3D unstructured tetrahedral meshes for any device shape. To run Victor Device simulations you have several actions:<\/p>\n<ul style=\"box-sizing: border-box; margin-top: 0px; margin-bottom: 1rem; color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial;\">\n<li>Specify the materials, models and simulation values<\/li>\n<li>Simulate steady-state\u00a0 Id-Vg, gm-Vg, Id-Vd and BV<\/li>\n<li>Small-signal (AC) capacitance-voltage (C-V) plot<\/li>\n<li>Device switching plots<\/li>\n<\/ul>\n<p style=\"box-sizing: border-box; margin: 0px 0px 20px; line-height: 24px; letter-spacing: normal; color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial;\">An initial solution is computed, then Id-Vg curves are produced for each Vds voltage, then transconductance gm-Vg are computed as shown below:<\/p>\n<div id=\"attachment_8528\" style=\"width: 560px\" class=\"wp-caption aligncenter\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-8528\" class=\"wp-image-8528 size-full\" src=\"\/wp-content\/uploads\/2020\/04\/Blog17.jpg\" alt=\"\" width=\"550\" height=\"375\" srcset=\"https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog17.jpg 550w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog17-300x205.jpg 300w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog17-43x29.jpg 43w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog17-63x43.jpg 63w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog17-48x33.jpg 48w\" sizes=\"(max-width: 550px) 100vw, 550px\" \/><p id=\"caption-attachment-8528\" class=\"wp-caption-text\">Computed Id-Vg curve (at Vd=0.1V) and extracted transconductance gm-Vg characteristics<\/p><\/div>\n<p><span style=\"color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial; display: inline !important; float: none;\">Here\u2019s the plot of Id-Vd at a select Vgs bias voltage:<\/span><\/p>\n<div id=\"attachment_8529\" style=\"width: 560px\" class=\"wp-caption aligncenter\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-8529\" class=\"wp-image-8529 size-full\" src=\"\/wp-content\/uploads\/2020\/04\/Blog18.jpg\" alt=\"\" width=\"550\" height=\"412\" srcset=\"https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog18.jpg 550w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog18-300x225.jpg 300w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog18-43x32.jpg 43w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog18-63x47.jpg 63w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog18-48x36.jpg 48w\" sizes=\"(max-width: 550px) 100vw, 550px\" \/><p id=\"caption-attachment-8529\" class=\"wp-caption-text\">Computed Id-Vd output characteristics, for selected Vg bias (Vg = 5V)<\/p><\/div>\n<p><span style=\"color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial; display: inline !important; float: none;\">A plot of Breakdown I-V is shown where the gate bias Vg = 0V:<\/span><\/p>\n<div id=\"attachment_8530\" style=\"width: 560px\" class=\"wp-caption aligncenter\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-8530\" class=\"wp-image-8530 size-full\" src=\"\/wp-content\/uploads\/2020\/04\/Blog19.jpg\" alt=\"\" width=\"550\" height=\"412\" srcset=\"https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog19.jpg 550w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog19-300x225.jpg 300w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog19-43x32.jpg 43w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog19-63x47.jpg 63w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog19-48x36.jpg 48w\" sizes=\"(max-width: 550px) 100vw, 550px\" \/><p id=\"caption-attachment-8530\" class=\"wp-caption-text\">Computed Breakdown I-V characteristics, for Vg=0V<\/p><\/div>\n<p style=\"box-sizing: border-box; margin: 0px 0px 20px; line-height: 24px; letter-spacing: normal; color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial;\">Each of these I-V curves was generated by the\u00a0TonyPlot\u00a0tool.<\/p>\n<p style=\"box-sizing: border-box; margin: 0px 0px 20px; line-height: 24px; letter-spacing: normal; color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial;\">C-V plots are simulated with Victory Device, and here\u2019s the small-signal (AC) results showing intrinsic capacitances:<\/p>\n<div id=\"attachment_8531\" style=\"width: 560px\" class=\"wp-caption aligncenter\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-8531\" class=\"wp-image-8531 size-full\" src=\"\/wp-content\/uploads\/2020\/04\/Blog20.jpg\" alt=\"\" width=\"550\" height=\"372\" srcset=\"https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog20.jpg 550w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog20-300x203.jpg 300w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog20-43x29.jpg 43w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog20-63x43.jpg 63w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/Blog20-48x32.jpg 48w\" sizes=\"(max-width: 550px) 100vw, 550px\" \/><p id=\"caption-attachment-8531\" class=\"wp-caption-text\">Computed device Capacitances versus Gate Voltage (Vg)<\/p><\/div>\n<p style=\"box-sizing: border-box; margin: 0px 0px 20px; line-height: 24px; letter-spacing: normal; color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial;\"><strong>Summary<\/strong><\/p>\n<p style=\"box-sizing: border-box; margin: 0px 0px 20px; line-height: 24px; letter-spacing: normal; color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial;\">Process engineers equipped with the proper modeling and simulation tools can now predict the behavior of power devices like Split-Gate Resurf Stepped Oxide (SG-RSO) MOSFET. Instead of running lots of silicon, measuring, tweaking and repeating, engineers can accurately model and optimize virtually, saving lots of time and money. Read the\u00a0<a href=\"https:\/\/silvaco.com\/simulation-standard\/advanced-process-and-device-3d-tcad-simulation-of-split-gate-trench-umosfet\/\" target=\"_blank\" rel=\"noreferrer noopener\" aria-label=\" (opens in a new tab)\">complete article online<\/a>.<\/p>\n<p style=\"box-sizing: border-box; margin: 0px 0px 20px; line-height: 24px; letter-spacing: normal; color: #0a0a0a; font-family: 'Open Sans', sans-serif; font-size: 14px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial;\">To read the rest of this SemiWiki blog continue to\u00a0<a href=\"https:\/\/semiwiki.com\/eda\/silvaco\/274459-3d-tcad-simulation-for-power-devices\/\" target=\"_blank\" rel=\"noreferrer noopener\">3D TCAD Simulation for Power Devices<\/a>.<\/p>\n<\/div><\/section><\/div><div class='av-flex-placeholder'><\/div><div class=\"flex_column av_one_fourth  flex_column_table_cell av-equal-height-column av-align-top av-zero-column-padding   avia-builder-el-3  el_after_av_three_fourth  avia-builder-el-last  \" style='border-radius:0px; '><div  class='avia-builder-widget-area clearfix  avia-builder-el-4  avia-builder-el-no-sibling '><div id=\"nav_menu-27\" class=\"widget clearfix widget_nav_menu\"><div class=\"menu-blog-side-menu-korean-container\"><ul id=\"menu-blog-side-menu-korean\" class=\"menu\"><li id=\"menu-item-25033\" class=\"menu-item menu-item-type-post_type menu-item-object-page menu-item-has-children menu-item-25033\"><a href=\"https:\/\/silvaco.com\/ko\/?page_id=24362\">\ube14\ub85c\uadf8<\/a>\n<ul class=\"sub-menu\">\n\t<li id=\"menu-item-25034\" class=\"menu-item menu-item-type-post_type menu-item-object-page menu-item-25034\"><a href=\"https:\/\/silvaco.com\/ko\/corporate\/blogs\/analog-custom-ic-design-blogs\/\">Analog Custom IC Design Blogs<\/a><\/li>\n\t<li id=\"menu-item-25035\" class=\"menu-item menu-item-type-post_type menu-item-object-page menu-item-25035\"><a href=\"https:\/\/silvaco.com\/ko\/blogs\/design-ip\/\">Design IP Blogs<\/a><\/li>\n\t<li id=\"menu-item-25036\" class=\"menu-item menu-item-type-post_type menu-item-object-page menu-item-25036\"><a href=\"https:\/\/silvaco.com\/ko\/meet-silvaco-blogs\/\">Meet Silvaco Blogs<\/a><\/li>\n\t<li id=\"menu-item-25037\" class=\"menu-item menu-item-type-post_type menu-item-object-page menu-item-25037\"><a href=\"https:\/\/silvaco.com\/ko\/tcad-blogs-2\/\">TCAD Blogs<\/a><\/li>\n<\/ul>\n<\/li>\n<\/ul><\/div><\/div><\/div><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n","protected":false},"excerpt":{"rendered":"<p>y first IC design back in 1978 was a DRAM and it ran on 12V, 5V and -5V, but then my second DRAM was using only a 5V supply. Today we see SOCs running under a 1V supply voltage, but there is a totally different market for power devices that are at the other end of the voltage spectrum and they handle switching ranges from 12V \u2013 250V. To learn more about power devices and how the process and device modeling is done, I read a Silvaco publication entitled Advanced Process and Device 3D TCAD Simulation of Split-Gate Trench UMOSFET.<\/p>\n","protected":false},"author":5,"featured_media":20265,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[7614],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v24.0 (Yoast SEO v24.0) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>3D TCAD Simulation for Power Devices - Silvaco<\/title>\n<meta name=\"description\" content=\"3D TCAD Simulation for Power Devices\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/silvaco.com\/ko\/tcad-ko\/tcad-blogs-ko\/3d-tcad-simulation-for-power-devices\/\" \/>\n<meta property=\"og:locale\" content=\"ko_KR\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"3D TCAD Simulation for Power Devices\" \/>\n<meta property=\"og:description\" content=\"3D TCAD Simulation for Power Devices\" \/>\n<meta property=\"og:url\" content=\"https:\/\/silvaco.com\/ko\/tcad-ko\/tcad-blogs-ko\/3d-tcad-simulation-for-power-devices\/\" \/>\n<meta property=\"og:site_name\" content=\"Silvaco\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/SilvacoSoftware\/\" \/>\n<meta property=\"article:published_time\" content=\"2019-09-04T16:45:12+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/silvaco.com\/wp-content\/uploads\/2020\/04\/tcad_process_device-11.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"500\" \/>\n\t<meta property=\"og:image:height\" content=\"500\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"author\" content=\"Ingrid Schwarz\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:creator\" content=\"@SilvacoSoftware\" \/>\n<meta name=\"twitter:site\" content=\"@SilvacoSoftware\" \/>\n<meta name=\"twitter:label1\" content=\"\uae00\uc4f4\uc774\" \/>\n\t<meta name=\"twitter:data1\" content=\"Ingrid Schwarz\" \/>\n\t<meta name=\"twitter:label2\" content=\"\uc608\uc0c1 \ub418\ub294 \ud310\ub3c5 \uc2dc\uac04\" \/>\n\t<meta name=\"twitter:data2\" content=\"5\ubd84\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/silvaco.com\/ko\/tcad-ko\/tcad-blogs-ko\/3d-tcad-simulation-for-power-devices\/\",\"url\":\"https:\/\/silvaco.com\/ko\/tcad-ko\/tcad-blogs-ko\/3d-tcad-simulation-for-power-devices\/\",\"name\":\"3D TCAD Simulation for Power Devices - 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