Hints, Tips and Solutions

Q. How can I ensure that the vertical Y.MESH spacing in my process simulation is adequate for my particular implant condition ?

A. A good technique to check that the mesh is not causing a problem is to perform an integration of the as-implanted species, directly after the implant within ATHENA. There are two ways the user may do this either by using an EXTRACT command or through TonyPlot.

To illustrate, if I perform the following implantation: