{"id":29784,"date":"1998-03-03T17:48:55","date_gmt":"1998-03-03T17:48:55","guid":{"rendered":"https:\/\/silvaco.com\/uncategorized\/scanbox-approach-to-shape-reconstruction-for-automated-reticle-inspection\/"},"modified":"2026-10-15T14:46:52","modified_gmt":"2026-10-15T21:46:52","slug":"scanbox-approach-to-shape-reconstruction-for-automated-reticle-inspection","status":"publish","type":"post","link":"https:\/\/silvaco.com\/ja\/simulation-standard\/scanbox-approach-to-shape-reconstruction-for-automated-reticle-inspection\/","title":{"rendered":"Scanbox Approach to Shape Reconstruction for Automated Reticle Inspection"},"content":{"rendered":"

Scanbox Approach to Shape Reconstruction for Automated Reticle Inspection<\/h1>\n

Abstract<\/p>\n

The paper describes a generalization of the scanline approach [1] to reconstruction of the shape of planar object represented by a discrete point set with a given distance threshold d. This problem arises in applications of VLSI layout image processing, e.g., during automated reticle inspection.<\/p>\n

Two algorithms are presented, with time complexities O(min {n2, (n + t)log n}) and O(n log n), respectively, where n is the number of input points, t is the number of fixed-radius neighbor pairs. The first one is applicable for sparse point sets, e.g., for almost-grid point sets. In addition, ideas from the first algorithm, combined with the scanbox approach lead to the second algorithm efficient in the general case.
\n<\/sup><\/p>\n

\"\"<\/p>\n

Download Simulation Standard<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"

The paper describes a generalization of the scanline approach [1] to reconstruction of the shape of planar object represented by a discrete point set with a given distance threshold d. This problem arises in applications of VLSI layout image processing, e.g., during automated reticle inspection.<\/p>\n","protected":false},"author":12,"featured_media":22106,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"inline_featured_image":false,"footnotes":""},"categories":[7570],"tags":[],"class_list":["post-29784","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-simulation-standard","entry","has-media"],"yoast_head":"\nScanbox Approach to Shape Reconstruction for Automated Reticle Inspection - Silvaco<\/title>\n<meta name=\"description\" content=\"The paper describes a generalization of the scanline approach [1] to reconstruction of the shape of planar object represented by a discrete point set with a given distance threshold d. 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This problem arises in applications of VLSI layout image processing, e.g., during automated reticle inspection.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/silvaco.com\/ja\/simulation-standard\/scanbox-approach-to-shape-reconstruction-for-automated-reticle-inspection\/\" \/>\n<meta property=\"og:site_name\" content=\"Silvaco\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/SilvacoSoftware\/\" \/>\n<meta property=\"article:published_time\" content=\"1998-03-03T17:48:55+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2026-10-15T21:46:52+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/silvaco.com\/wp-content\/uploads\/simulationstandard\/simstd_mar_1998_a2.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"1210\" \/>\n\t<meta property=\"og:image:height\" content=\"1669\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"author\" content=\"Casey Molver\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:creator\" content=\"@SilvacoSoftware\" \/>\n<meta name=\"twitter:site\" content=\"@SilvacoSoftware\" \/>\n<meta name=\"twitter:label1\" content=\"\u57f7\u7b46\u8005\" \/>\n\t<meta name=\"twitter:data1\" content=\"Casey Molver\" \/>\n\t<meta name=\"twitter:label2\" content=\"\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593\" \/>\n\t<meta name=\"twitter:data2\" content=\"1 minute\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\\\/\\\/silvaco.com\\\/ja\\\/simulation-standard\\\/scanbox-approach-to-shape-reconstruction-for-automated-reticle-inspection\\\/#article\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/silvaco.com\\\/ja\\\/simulation-standard\\\/scanbox-approach-to-shape-reconstruction-for-automated-reticle-inspection\\\/\"},\"author\":{\"name\":\"Casey Molver\",\"@id\":\"https:\\\/\\\/silvaco.com\\\/ja\\\/#\\\/schema\\\/person\\\/2763eb741ca5ac04477fdff50ed84c80\"},\"headline\":\"Scanbox Approach to Shape Reconstruction for Automated Reticle Inspection\",\"datePublished\":\"1998-03-03T17:48:55+00:00\",\"dateModified\":\"2026-10-15T21:46:52+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\\\/\\\/silvaco.com\\\/ja\\\/simulation-standard\\\/scanbox-approach-to-shape-reconstruction-for-automated-reticle-inspection\\\/\"},\"wordCount\":140,\"image\":{\"@id\":\"https:\\\/\\\/silvaco.com\\\/ja\\\/simulation-standard\\\/scanbox-approach-to-shape-reconstruction-for-automated-reticle-inspection\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/silvaco.com\\\/wp-content\\\/uploads\\\/simulationstandard\\\/simstd_mar_1998_a2.jpg\",\"articleSection\":[\"Simulation Standard\"],\"inLanguage\":\"ja\"},{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/silvaco.com\\\/ja\\\/simulation-standard\\\/scanbox-approach-to-shape-reconstruction-for-automated-reticle-inspection\\\/\",\"url\":\"https:\\\/\\\/silvaco.com\\\/ja\\\/simulation-standard\\\/scanbox-approach-to-shape-reconstruction-for-automated-reticle-inspection\\\/\",\"name\":\"Scanbox Approach to Shape Reconstruction for Automated Reticle Inspection - Silvaco\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/silvaco.com\\\/ja\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\\\/\\\/silvaco.com\\\/ja\\\/simulation-standard\\\/scanbox-approach-to-shape-reconstruction-for-automated-reticle-inspection\\\/#primaryimage\"},\"image\":{\"@id\":\"https:\\\/\\\/silvaco.com\\\/ja\\\/simulation-standard\\\/scanbox-approach-to-shape-reconstruction-for-automated-reticle-inspection\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/silvaco.com\\\/wp-content\\\/uploads\\\/simulationstandard\\\/simstd_mar_1998_a2.jpg\",\"datePublished\":\"1998-03-03T17:48:55+00:00\",\"dateModified\":\"2026-10-15T21:46:52+00:00\",\"author\":{\"@id\":\"https:\\\/\\\/silvaco.com\\\/ja\\\/#\\\/schema\\\/person\\\/2763eb741ca5ac04477fdff50ed84c80\"},\"description\":\"The paper describes a generalization of the scanline approach [1] to reconstruction of the shape of planar object represented by a discrete point set with a given distance threshold d. 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