{"id":29415,"date":"2003-02-01T22:11:47","date_gmt":"2003-02-01T22:11:47","guid":{"rendered":"https:\/\/silvaco.com\/uncategorized\/exact2-interconnect-parasitic-capacitance-simulator\/"},"modified":"2021-07-08T18:37:16","modified_gmt":"2021-07-09T01:37:16","slug":"exact2-interconnect-parasitic-capacitance-simulator","status":"publish","type":"post","link":"https:\/\/silvaco.com\/ja\/simulation-standard\/exact2-interconnect-parasitic-capacitance-simulator\/","title":{"rendered":"Exact2: Interconnect Parasitic Capacitance Simulator"},"content":{"rendered":"
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Exact2: Interconnect Parasitic Capacitance Simulator<\/h1>\n

Introduction<\/h3>\n

Exact2 from Silvaco is a sophisticated, physically-based simulation tool for calculating semiconductor interconnect capacitance values. Its purpose is to build a capacitance coefficient database that is usable by any layout parasitic capacitance (LPE) tool.<\/p>\n

In order to accurately calculate these coefficients, it is important that the actual interconnect structures are accurately defined. Exact2 achieves this by means of an internal, physically-based 3D process simulator. Included with the process simulator is an internal 3D field solver that calculates the capacitance for each device layer and structure combination. Exact2 also creates capacitance rule files readable by any LPE tool through the use of analysis script files, written in LISA code which is, Silvaco\u2019s dynamic scripting language.<\/p>\n

This article presents an overview of Exact2\u2019s features, capabilities, and use.<\/p>\n<\/div><\/section><\/div>

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