{"id":29125,"date":"2009-01-01T14:57:34","date_gmt":"2009-01-01T14:57:34","guid":{"rendered":"https:\/\/silvaco.com\/uncategorized\/3d-simulation-of-ion-milling-for-mass-storage-applications\/"},"modified":"2021-07-08T18:24:10","modified_gmt":"2021-07-09T01:24:10","slug":"3d-simulation-of-ion-milling-for-mass-storage-applications","status":"publish","type":"post","link":"https:\/\/silvaco.com\/ja\/simulation-standard\/3d-simulation-of-ion-milling-for-mass-storage-applications\/","title":{"rendered":"3D Simulation of Ion Milling for Mass Storage Applications"},"content":{"rendered":"<div id='template_overview'  class='avia-section main_color avia-section-small avia-no-border-styling  avia-bg-style-scroll  avia-builder-el-0  el_before_av_section  avia-builder-el-first   container_wrap fullsize' style='background-color: #ffffff;  margin-top:0px; margin-bottom:0px; '  ><div class='container' ><main  role=\"main\" itemprop=\"mainContentOfPage\"  class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-29125'><div class='entry-content-wrapper clearfix'>\n<div class='flex_column_table av-equal-height-column-flextable -flextable' style='margin-top:20px; margin-bottom:0px; '><div class=\"flex_column av_three_fourth  flex_column_table_cell av-equal-height-column av-align-top first  avia-builder-el-1  el_before_av_one_fourth  avia-builder-el-first  \" style='padding:0px 0px 0px 0px ; border-radius:0px; '><section class=\"av_textblock_section \"  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock  '   itemprop=\"text\" ><h1><strong>3D Simulation of Ion Milling for Mass Storage Applications<\/strong><\/h1>\n<p style=\"color: #000000; font-size: medium; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration-style: initial; text-decoration-color: initial;\" align=\"center\"><em>Z. Djuric, A. Hoessinger, A. Babayan, A. Nejim, Silvaco Data Systems Europe Ltd,<br \/>\nSilvaco Technology Centre, Compass Point, St. Ives, Cambridgeshire PE27 5JL UK,<br \/>\nB. Lafferty &amp; A. Moore, Seagate Technology (Ireland), 1 Disc Drive, Springtown Ind Estate,<br \/>\nDerry, N. Ireland BT48 0BF, UK<br \/>\nM.A. Seigler, Seagate Research, 1251 Waterfront Place, Pittsburgh, PA 15222, USA<\/em><\/p>\n<p style=\"color: #000000; font-size: medium; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration-style: initial; text-decoration-color: initial;\"><strong>Introduction<\/strong><\/p>\n<p style=\"color: #000000; font-size: medium; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration-style: initial; text-decoration-color: initial;\">The ion milling process is used extensively in the Hard Disc Drive industry, particularly in the manufacture of thin film magnetic heads. Ion milling is used to pattern many metal and dielectric materials including alloys comprising of Fe, Co and\/or Ni transition metals which are commonly found in a thin film magnetic read-write transducers. This paper presents new results for ion milling and redeposition of gold on photoresist patterns at different milling angles and compared with 3D process simulation results.<\/p>\n<p style=\"color: #000000; font-size: medium; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration-style: initial; text-decoration-color: initial;\"><strong>Ion Milling Process<\/strong><\/p>\n<p style=\"color: #000000; font-size: medium; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration-style: initial; text-decoration-color: initial;\">The basic principle of ion milling involves bombarding a target with energetic ions or neutral atoms accelerated and formed into an ion beam [1, 2]. Material is sputtered from the specimen resulting in thinning of sheet film samples or pattering selectively masked structures. The etch rate is usually highly sensitive to mill angle and is dependant upon the element or alloy being sputtered. Argon or another inert element is typically used for the milling beam. A reactive element can also be introduced into the plasma to adjust the relative selectivity or etch rate of materials being removed.<\/p>\n<\/div><\/section><\/div><div class='av-flex-placeholder'><\/div><div class=\"flex_column av_one_fourth  flex_column_table_cell av-equal-height-column av-align-top av-zero-column-padding   avia-builder-el-3  el_after_av_three_fourth  avia-builder-el-last  \" style='border-radius:0px; ' id=\"whitepaper\" ><p><div  class='avia-builder-widget-area clearfix  avia-builder-el-4  el_before_av_image  avia-builder-el-first '><div id=\"nav_menu-29\" class=\"widget clearfix widget_nav_menu\"><div class=\"menu-simulation-standard-side-menu-japanese-container\"><ul id=\"menu-simulation-standard-side-menu-japanese\" class=\"menu\"><li id=\"menu-item-26253\" class=\"menu-item menu-item-type-post_type menu-item-object-page menu-item-26253\"><a href=\"https:\/\/silvaco.com\/ja\/technical-library\/simulation-standard\/\">Simulation Standard<\/a><\/li>\n<\/ul><\/div><\/div><\/div><br \/>\n<div  class='avia-image-container  av-styling-    avia-builder-el-5  el_after_av_sidebar  el_before_av_button  avia-align-center '  itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\"  ><div class='avia-image-container-inner'><div class='avia-image-overlay-wrap'><a href=\"\/dynamicweb\/jsp\/downloads\/DownloadDocStepsAction.do?req=download&amp;nm=simstd_Q1_2009_a3.pdf\" class='avia_image' target=\"_blank\" rel=\"noopener noreferrer\"><img decoding=\"async\" width=\"232\" height=\"300\" class='wp-image-19907 avia-img-lazy-loading-not-19907 avia_image' src=\"https:\/\/silvaco.com\/wp-content\/uploads\/2020\/03\/simstd_Q1_2009_a3-232x300.jpg\" alt='' title='simstd_Q1_2009_a3'  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/silvaco.com\/wp-content\/uploads\/2020\/03\/simstd_Q1_2009_a3-232x300.jpg 232w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/03\/simstd_Q1_2009_a3-768x994.jpg 768w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/03\/simstd_Q1_2009_a3-545x705.jpg 545w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/03\/simstd_Q1_2009_a3-29x37.jpg 29w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/03\/simstd_Q1_2009_a3-43x55.jpg 43w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/03\/simstd_Q1_2009_a3-37x48.jpg 37w, https:\/\/silvaco.com\/wp-content\/uploads\/2020\/03\/simstd_Q1_2009_a3.jpg 782w\" sizes=\"(max-width: 232px) 100vw, 232px\" \/><\/a><\/div><\/div><\/div><br \/>\n<div  class='avia-button-wrap avia-button-center  avia-builder-el-6  el_after_av_image  avia-builder-el-last ' ><a href='\/dynamicweb\/jsp\/downloads\/DownloadDocStepsAction.do?req=download&amp;nm=simstd_Q1_2009_a3.pdf' class='avia-button  avia-color-grey   avia-icon_select-yes-right-icon avia-size-small avia-position-center ' target=\"_blank\" rel=\"noopener noreferrer\"><span class='avia_iconbox_title' >Download Simulation Standard<\/span><span class='avia_button_icon avia_button_icon_right' aria-hidden='true' data-av_icon='\ue875' data-av_iconfont='entypo-fontello'><\/span><\/a><\/div><\/p><\/div><\/div><!--close column table wrapper. Autoclose: 1 --><\/div><\/div><\/main><!-- close content main element --><\/div><\/div><div id='av_section_2'  class='avia-section main_color avia-section-small avia-no-border-styling  avia-bg-style-scroll  avia-builder-el-7  el_after_av_section  avia-builder-el-last   container_wrap fullsize' style='background-color: #ffffff;  margin-top:0px; margin-bottom:0px; '  ><div class='container' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-29125'><div class='entry-content-wrapper clearfix'>\n<div class='flex_column_table av-equal-height-column-flextable -flextable' style='margin-top:20px; margin-bottom:0px; '><div class=\"flex_column av_one_full  flex_column_table_cell av-equal-height-column av-align-top first  avia-builder-el-8  avia-builder-el-no-sibling  \" style='padding:0px 0px 0px 0px ; border-radius:0px; '><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<\/p>\n","protected":false},"excerpt":{"rendered":"<p>The ion milling process is used extensively in the Hard Disc Drive industry, particularly in the manufacture of thin film magnetic heads. Ion milling is used to pattern many metal and dielectric materials including alloys comprising of Fe, Co and\/or Ni transition metals which are commonly found in a thin film magnetic read-write transducers. This paper presents new results for ion milling and redeposition of gold on photoresist patterns at different milling angles and compared with 3D process simulation results.<\/p>\n","protected":false},"author":5,"featured_media":19907,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[7570],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v24.0 (Yoast SEO v24.0) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>3D Simulation of Ion Milling for Mass Storage Applications - \u30b7\u30eb\u30d0\u30b3\u30fb\u30b8\u30e3\u30d1\u30f3 : Silvaco Japan<\/title>\n<meta name=\"description\" content=\"The ion milling process is used extensively in the Hard Disc Drive industry, particularly in the manufacture of thin film magnetic heads.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/silvaco.com\/ja\/simulation-standard\/3d-simulation-of-ion-milling-for-mass-storage-applications\/\" \/>\n<meta property=\"og:locale\" content=\"ja_JP\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"3D Simulation of Ion Milling for Mass Storage Applications\" \/>\n<meta property=\"og:description\" content=\"The ion milling process is used extensively in the Hard Disc Drive industry, particularly in the manufacture of thin film magnetic heads.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/silvaco.com\/ja\/simulation-standard\/3d-simulation-of-ion-milling-for-mass-storage-applications\/\" \/>\n<meta property=\"og:site_name\" content=\"\u30b7\u30eb\u30d0\u30b3\u30fb\u30b8\u30e3\u30d1\u30f3 : Silvaco Japan\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/SilvacoSoftware\/\" \/>\n<meta property=\"article:published_time\" content=\"2009-01-01T14:57:34+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2021-07-09T01:24:10+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/silvaco.com\/wp-content\/uploads\/2020\/03\/simstd_Q1_2009_a3.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"782\" \/>\n\t<meta property=\"og:image:height\" content=\"1012\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"author\" content=\"Ingrid Schwarz\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:creator\" content=\"@SilvacoSoftware\" \/>\n<meta name=\"twitter:site\" content=\"@SilvacoSoftware\" \/>\n<meta name=\"twitter:label1\" content=\"\u57f7\u7b46\u8005\" \/>\n\t<meta name=\"twitter:data1\" content=\"Ingrid Schwarz\" \/>\n\t<meta name=\"twitter:label2\" content=\"\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593\" \/>\n\t<meta name=\"twitter:data2\" content=\"5\u5206\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/silvaco.com\/ja\/simulation-standard\/3d-simulation-of-ion-milling-for-mass-storage-applications\/\",\"url\":\"https:\/\/silvaco.com\/ja\/simulation-standard\/3d-simulation-of-ion-milling-for-mass-storage-applications\/\",\"name\":\"3D Simulation of Ion Milling for Mass Storage Applications - 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