• TCAD Examples

anoxex06.in : Stress Dependent Oxidation

Requires: SSuprem 4
Minimum Versions: Athena 5.22.3.R

This example demonstrates the use of SSuprem 4 stress dependent Visco-Elastic Oxidation model. Visco-Elastic, Stress Dependent Models take longer to run than the default ( COMPRESS ) oxidation model and therefore should only be used when specifically looking at oxides grown at a temperature of greater than 965C (viscous flow temperature), and when the oxide profile is critical. Oxidations in this example are performed with and without the stress dependence. The results of oxidation using the two models are plotted together using Tonyplot to compare the structures predicted by the two models.

To enable the stress dependent viscous model the syntax required is:
method viscous
oxide stress.dep=t

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.

Input Files
Output Results
These examples are for reference only. Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software.
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