• TCAD Examples

anoxex10.in : Void Formation During Trench Oxidation

Requires: SSuprem 4
Minimum Versions: Athena 5.22.3.R

This example demonstrates SSuprem 4's ability to oxidize when colliding oxide fronts cause a void. A narrow trench is oxidized until the opposing oxidation fronts touch. During the oxidation SSuprem 4 saves the structure after each time step. These saved structures as well as the final structure are used to monitor the moving boundary progress.

To watch the movie, first select "Select all plots" from the "View" popup and then select "Movie.." from the "Tools" popup.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.

Input Files
Output Results
These examples are for reference only. Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software.
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