• TCAD Examples

vpex09.in : Oxidation example

Requires: Victory Process : Core Simulator, 3D Diffusion & Implantation, 3D Oxidation
Minimum Versions: Victory Process 7.22.0.R

This example demonstrates geometrical deposition, oxidation, layer thickness extraction and saving and restoring of simulation status. This example also illustrates the handling of external layout files (.lay format) in Victory Process.

List of key syntax:

Init: Defines simulation volume and meshing resolution

Deposit: Deposition with geometrical mode

Oxidize: Oxidation emulation with analytical mode

Diffuse: Oxidation simulation with physical mode

Extract: Extracts properties from simulation result

Save: Saves simulation status

Load: Restores simulation status

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.

Input Files
Output Results
These examples are for reference only. Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software.
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