vp2dex02.in : Geometric deposition models in 2D
Requires: Victory Process
Minimum Version: Victory Process 7.76.1.R
The example demonstrates different geometric deposition models. The example is set up such that a polysilicon window is created, followed by deposition of a nitride layer repeated 6 times, each showing the operation of a specific geometric deposition model.
Models explored in this example set are:
- Max model, which is set up to show thicknesses greater than 0, less than 0 and equal to 0;
- min mode with thickness value set greater than 0 (only option) ;
- conformal model, and
- directional mode.
To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.
# Example for geometric deposition models ##The example is set up such that a polysilicon window is created, followed by deposition of a nitride layer repeated 6 times, each showing the operation of a specific geometric deposition model. # Max model: The value passed to the THICKNESS parameter is the distance of the horizontal plane from the highest point of the structure. # Max model:Thickness>0 go victoryp init meshdepth=2 material=silicon orientation=100 from=0 to=3 depth=1 resolution=0.07 gasheight=3 deposit material = polysilicon thick=0.3 max Etch between=1,2 material=polysilicon thickness=0.3 max save name=vp2dex02_init export structure = vp2dex02_init.str deposit nitride thick=0.2 max export structure = vp2dex02_0a.str #Max model: Thickness=0 load name=vp2dex02_init deposit nitride thick=0 max export structure = vp2dex02_0b.str #Max model: Thickness<0 load name=vp2dex02_init deposit nitride thick=-0.2 max export structure = vp2dex02_0c.str #Min model: The value passed to the THICKNESS parameter is the distance of the horizontal plane from the lowest point of the structure. Thickness can only be greater than 0; Usefull when filling cavities or trenches load name=vp2dex02_init deposit nitride thick=0.2 min export structure = vp2dex02_1.str #Conformal mode: It puts the deposited material conformally on top of a non-planar surface load name=vp2dex02_init deposit nitride thick=0.2 conformal export structure = vp2dex02_2.str #Directional mode: It puts the deposited material with an offset only in z-direction on top of a non-planar surface. load name=vp2dex02_init deposit nitride thick=0.2 directional export structure = vp2dex02_3.str tonyplot vp2dex02_init.str tonyplot -add vp2dex02_0a.str vp2dex02_0b.str vp2dex02_0c.str vp2dex02_1.str vp2dex02_2.str vp2dex02_3.str -set vp2dex02.set quit
These examples are for reference only. Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software.