• TCAD Examples

    TCAD Examples

vp2dex02.in : Geometric deposition models in 2D

Requires: Victory Process
Minimum Version: Victory Process 7.76.1.R

The example demonstrates different geometric deposition models. The example is set up such that a polysilicon window is created, followed by deposition of a nitride layer repeated 6 times, each showing the operation of a specific geometric deposition model.

Models explored in this example set are:

  • Max model, which is set up to show thicknesses greater than 0, less than 0 and equal to 0;
  • min mode with thickness value set greater than 0 (only option) ;
  • conformal model, and
  • directional mode.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.

Input Files
Output Results
These examples are for reference only. Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software.
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