#Example set depicting deep trench implant and the associated shadow effect seen on the trench wall. ##process set up in process mode (2D) go victoryp simflags = "-P 6" set name = "vp2dex07" set length = 0.5 set depth = 2 set tilt = 12 init material=silicon gasheight=2 meshdepth=2 depth=5 from=0 to=1 at=0.5 resolution=0.01 line z loc= 0 spac=0.01 line z loc= $depth-2 spac=0.01 line z loc= $depth-1 spac=0.01 line z loc= $depth spac=0.01 line z loc= $depth+0.5 spac=0.01 line x loc= 0 spac=0.01 line x loc= 0.1 spac=0.01 line x loc= 0.2 spac=0.01 line x loc= $length/2 spac=0.01 line x loc= $length spac=0.01 line x loc= $length+0.1 spac=0.01 line x loc= $length+0.2 spac=0.01 specifymaskpoly mask="trench" p=$length/2,0.1 p=$length/2,0.8 p=$length,0.8 p=$length,0.1 save name = trench etch silicon mask="trench" reverse thickness=$depth max export structure = vp2dex07_0.str #mask mask="trench" reverse implant boron dose=1e13 energy = 80 tilt=$tilt bca n.ion=500000 export structure = vp2dex07_1.str tonyplot vp2dex07_1.str -set vp2dex07.set quit
These examples are for reference only. Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software.