• TCAD Examples

    TCAD Examples

vp2dex01.in : Geometric etching models in 2D

Requires: Victory Process
Minimum Version: Victory Process 7.58.2.R

This example demonstrates different geometric etching models provided by Victory Process. The example is set up with a simplistic structure consisting of a silicon surface with a window of polysilicon etched out and a conformal layer of nitride deposited in it.

This layer is etched using different etching models namely min, max, dry, wet and lastdepo.

Min model etches the structure down to a depth (thickness) as measured from the lowest plane of the material (selective etching) or the lowest plane of the structure (non-selective etching).

Similarly, max model etches the structure down to a depth (thickness) measured from the highest point/plane of the material ( selective etching) or the lowest plane of the structure (non-selective etching).

Dry and wet etch models enable anisotropic etching and isotropic etching respectively.

Lastly, lastdepo model removes the last deposited layer. The example deposits a thin conformal layer of aluminum and uses lastdepo to remove it, leaving the nitride layer untouched.

This example can be used as a template for using different etching models depending on the requirement.

The example plots the produced structures using Tonyplot.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.

Input Files
Output Results
These examples are for reference only. Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software.
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