Imaging Using Spatial Filtering Techniques : Imaging Using Spatial Filtering Techniques

Requires: SSuprem 4/Optolith
Minimum Versions: Athena 5.22.3.R

This example simulates DUV lithography using more complicated annular apertures.

The input deck is composed of two parts. The first part shows standard imaging, where the Aerial Image was generated using a circular aperture.

The second part of the Input deck repeats the same simulation conditions, but it uses spatial filtering in the projection system with an annular aperture constructed from five zones.

Note the difference in aerial image data generated by the two parts of the input deck. The image for the filtered system shows an improved quality for smaller CDs when compared with the image for the circular aperture.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.