• TCAD Examples

anopex04.in : Imaging Using an Annular Illuminator

Requires: SSuprem 4/Optolith
Minimum Versions: Athena 5.22.3.R

This example compares DUV lithography using annular and circular apertures.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.

Input Files
Output Results
These examples are for reference only. Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software.
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