Contact Printing Simulation : Contact Printing Simulation

Requires: SSuprem 4/Optolith
Minimum Versions: Athena 5.22.3.R

This example demonstrates simulation of contact printing for a simple mask consisting of from two elbows and a contact hole (cd=1 um). The parameter GAP in the IMAGE statement specifies the mask-to-wafer gap (in microns) for contact printing.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.