TCAD Examples

											go internal

set example=anopex22
load infile=$"example"_tmpl.in
save type=sdb outfile=$"example".dat


sweep parameter=dist type=linear range="0.32, 0.52, 5" \
      parameter=width type=linear range="0.04, 0.12, 3"

tonyplot $"example"*.str -set $"example".set
tonyplot $"example".dat -set  $"example"_dat.set
quit

################# Content of anopex22_tmpl.in file ########################################
# go athena 
# 
#  Mask layout: 0.3 um contact hole and 0.3 contact hole
#  with sub-imageable (0.04 - 0.12 um) 180 degree Phase Shifters (outriggers).
# 
# line x loc=-0.6 spac=0.1 
# line x loc=-0.15 spac=0.01
# line x loc=0 spac=0.1 
# line x loc=0.15 spac=0.01
# line x loc=0.6 spac=0.1
# line y loc=1.1 spac=0.5 
# line y loc=1.6 spac=0.5 
# init silicon
# rate.develop name.resist= OiR32 i.line c.dill=0.026
#
# deposit nitride thick=0.035
# deposit name.resist=OiR32 thick=.8 divisions=30
# Aerial image calculation
# 
# illumination i.line 
# illum.filter clear.fil circle sigma=0.38
# projection na=.54
# pupil.filter clear.fil circle
# 
# set dist=0.3
# set width=0.1
# layout lay.clear x.lo=-0.15 z.lo=-0.15 x.hi=0.15 z.hi=0.15 phase=0. trans=1.
# layout x.lo=-$dist z.lo=$dist x.hi=$dist z.hi=($dist+$width) phase=180. trans=1.
# layout x.lo=-$dist z.lo=-($dist+$width) x.hi=$dist z.hi=-$dist phase=180. trans=1.
# layout x.lo=-($dist+$width) z.lo=-$dist x.hi=-$dist z.hi=$dist phase=180. trans=1.
# layout x.lo=$dist z.lo=-$dist x.hi=($dist+$width) z.hi=$dist phase=180. trans=1.
#
# image win.x.lo=-0.75 win.x.hi=0.75 win.z.lo=0 win.z.hi=0 dx=0.01 
#
# structure outfile=anopex03_int.str intensity
#
# extract init inf="anopex03_int.str" 
# extract name="peak" 2d.max.conc impurity="Norm Intensity" material="All"
#
# expose dose=230 num.refl=10
# bake time=45 seconds temp=115
# develop mack time=60 steps=4 substeps=30
#
# structure outfile=anopex22_w$"width"d$"dist".str
############################################################################################