Smile Plot Generation : Smile Plot Generation

Requires: SSuprem 4/Optolith
Minimum Versions: Athena 5.22.3.R

This example demonstrates how to use DBInternal capabilities to generate smile plots. The CDs are extracted for 11 values of defocus for 6 different doses. The smile plot obtained allows us to select the optimum dose for this lithography process.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.