Imaging of a Complex Mask using MaskViews : Imaging of a Complex Mask using MaskViews

Requires: SSuprem 4/Optolith
Minimum Versions: Athena 5.22.3.R

NOTE: This example works only on UNIX/LINUX computers.

This example shows the ability of Optolith to simulate aerial image formation of a complicated mask. The mask is stored in anopex14.lay for use in MaskViews . There are two ways of loading mask information into Optolith : through the section file anopex14.sec generated by MaskViews or by direct use of MaskViews layout file anopex14.lay. Final images are similar. The first approach is more appropriate to the Manhattan layout, while second approach is advantageous for layouts with arbitrary polygons.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.