• TCAD Examples

    TCAD Examples

powerex15.in : SEU Induced Gate Rupture (SEGR) in a Power MOSFET

Requires: SSuprem 4/S-Pisces
Minimum Versions: Athena 5.22.3.R, Atlas 5.34.0.R

This examples demonstrates how an SEU strike in a power MOSFET can create a high transitory gate field sufficient to rupture the gate oxide. Experimnets have shown that a transitory breakdown field across the gate oxide that only lasts for pico-second time scales, is sufficient to rupture the gate causing permanant damage to the device.

A gate rupture event is dependent on both the device bias and the LET of the SEU strike. The bias that creates the most sensitive conditions for a gate rupture event occurs when the field across the gate oxide from the gate bias is in the same direction as the additional field from the induced charges from the SEU event. When this condition occurs, the existing field across the device from the gate bias is re-enforced by the additional field created by the SEU induced charge track, thus minimizing the LET required from the SEU strike to cause a gate rupture event.

The example creates a power MOSFET structure using the Athena process simulator. Circular symmetry is then used for the device simulations, where the center of the cylindrical device is at X=0 (the left hand side of the structure).

An SEU strike with an LET of 37.2 (corresponding to a Bromine Ion), is simulated, with the strike occuring at the center of the device (X=0). At the time of the SEU strike, a bias of -13.9 volts is applied to the gate and 30 volts on the drain. This bias condition creates a near critical condition close to that required for a gate rupture event to occur.

The gate oxide field was probed near the strike, such that gate oxide field versus time could be plotted before, during and after the SEU strike. After the SEU strike occurs, this critical reversed bias condition results in a peak gate oxide field that increases by over 3 times the field from just the DC bias condition alone.

The evolution of the hole concentration distribution was also monitored at 5, 50 and 150 pico seconds after the strike. The drain current was simulated over a longer time span. Just for completeness sake the breakdown voltage and unsaturated threshold voltage (for Vd=0.1 volts) were also simulated.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.

Input Files
Output Results
These examples are for reference only. Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software.
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