• TCAD Examples

    TCAD Examples

mos2ex10.in : 2D NMOS simulation from 1D Athena Doping

Requires: Athena/S-Pisces
Minimum Versions: Athena 5.22.3.R, Atlas 5.32.0.R

This example demonstrates the interface between Athena process simulation in 1D mode and Atlas (2D device simulation). The main features are:

  • Run Athena simulation in 1D mode of NMOS source/drain doping
  • Run Athena simulation in 1D mode of NMOS channel
  • Combine two 1D doping files into a 2D structure in Atlas
  • Regrid the structure based on net doping level

The key syntax for reading the Athena data into Atlas are the doping statements. The parameters of the doping statement specify the input ,filename, which dopant is to be used from the file and the 2D extent of the doping. The athena.1d parameter must be used to specify the data format of the Athena 1D profile.

The lateral spread of the dopant in each doping statement is controlled by the ratio.lat parameter. This is a multiplier to the vertical rolloff.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.

Input Files
Output Results
These examples are for reference only. Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software.
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