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simstd_may_2003_a2.pdfPublication Date:
May 02, 2003Size:
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Silvaco’s Binary Collision Approximation (BCA) Monte- Carlo Implantation simulator closely replicates the physics of implantation by individually tracking implanted ions and their resulting interstitial and vacancy damage as the ions collide and interact with atoms in the substrate. The simulator then tracks subsequent ions, gradually building up the implanted ion concentration profile, until the required number of ions is reached.Registration
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