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simstd_jul_2003_a3.pdf

Publication Date:

Jul 03, 2003

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19.84 KB

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There are several ways to account for the effect of STI-induced stress in standard compact models. The purpose of this article is to present two different approaches developed by the universities of Berkeley and Hiroshima. In both cases, new equations were derived and new parameters have been introduced in the latest versions of BSIM4 and HiSIM compact models. These new versions are currently supported by Silvaco SmartSpice/UTMOST softwares.


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