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simstd_Q4_2010_a1.pdfPublication Date:
Oct 01, 2010Size:
8.29 MBDescription:
VICTORY Process, the 3D process simulator now includes a module for plasma etching. The module is designed to simulate plasma etching processes at the feature-scale size. The simulation in the reactor-scale region is out of the scope of VICTORY Process. All transport characteristics data (as functions of reactor parameters needed for the feature-scale simulation) are modeled by user definable C-functions and are supplied to the module.Registration
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